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Description
  • Samples for inelastic electron tunneling spectroscopy are thin film capacitors with alumina dielectrics. Measured material is applied onto this dielectrics. One of common technologies of alumina film preparation is magnetron sputtering. Properties of the film influence properties of the tunneling junction significantly. Therefore a mathematical model of the process of magnetron sputtering of these films was created using factorial experiments.The model makes manufacturing of the films with requested properties and high accuracy possible.
  • Samples for inelastic electron tunneling spectroscopy are thin film capacitors with alumina dielectrics. Measured material is applied onto this dielectrics. One of common technologies of alumina film preparation is magnetron sputtering. Properties of the film influence properties of the tunneling junction significantly. Therefore a mathematical model of the process of magnetron sputtering of these films was created using factorial experiments.The model makes manufacturing of the films with requested properties and high accuracy possible. (en)
Title
  • Study of Sputtering Process of Alumina Thin Films
  • Study of Sputtering Process of Alumina Thin Films (en)
skos:prefLabel
  • Study of Sputtering Process of Alumina Thin Films
  • Study of Sputtering Process of Alumina Thin Films (en)
skos:notation
  • RIV/68407700:21230/13:00205507!RIV15-MSM-21230___
http://linked.open...avai/riv/aktivita
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  • Z(MSM6840770021)
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
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  • 108757
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  • RIV/68407700:21230/13:00205507
http://linked.open...riv/jazykVysledku
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  • magnetron sputtering; alumina thin film; DOE; mathematical model (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...ontrolniKodProRIV
  • [3D2CD7693D81]
http://linked.open...v/mistoKonaniAkce
  • Alba Iulia
http://linked.open...i/riv/mistoVydani
  • New York
http://linked.open...i/riv/nazevZdroje
  • Proceedings of the International Spring Seminar on Electronic Technology
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  • Mach, Pavel
  • Kolářová, J.
  • Kocian, M.
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http://linked.open...n/vavai/riv/zamer
issn
  • 2161-2528
number of pages
http://bibframe.org/vocab/doi
  • 10.1109/ISSE.2013.6648251
http://purl.org/ne...btex#hasPublisher
  • IEEE
https://schema.org/isbn
  • 9781479900367
http://localhost/t...ganizacniJednotka
  • 21230
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