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  • This papers reports, for the first time, on a piezoelectric response investigation of AlGaN/GaN-based circular high electron mobility transistor (C-HEMT) structures, which can be potentially applied in new devices for dynamic pressure and stress sensing. We present the processing technology and a piezoelectric performance analysis of the C-HEMT devices. The analysis obtained experimentally is compared with the results of electro-mechanical simulation. The measurements and simulations revealed a good linearity in the piezoelectric response and excellent stress detection sensitivity that is independent from the frequency range measured.
  • This papers reports, for the first time, on a piezoelectric response investigation of AlGaN/GaN-based circular high electron mobility transistor (C-HEMT) structures, which can be potentially applied in new devices for dynamic pressure and stress sensing. We present the processing technology and a piezoelectric performance analysis of the C-HEMT devices. The analysis obtained experimentally is compared with the results of electro-mechanical simulation. The measurements and simulations revealed a good linearity in the piezoelectric response and excellent stress detection sensitivity that is independent from the frequency range measured. (en)
Title
  • Piezoelectric response of AlGaN/GaN-based circular-HEMT structures
  • Piezoelectric response of AlGaN/GaN-based circular-HEMT structures (en)
skos:prefLabel
  • Piezoelectric response of AlGaN/GaN-based circular-HEMT structures
  • Piezoelectric response of AlGaN/GaN-based circular-HEMT structures (en)
skos:notation
  • RIV/68407700:21230/11:00186058!RIV13-GA0-21230___
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • P(GA102/09/1601)
http://linked.open...iv/cisloPeriodika
  • 8
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
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http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 220384
http://linked.open...ai/riv/idVysledku
  • RIV/68407700:21230/11:00186058
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • AlGaN/GaN; HEMT; Piezoelectric response; SiC; Stress sensor (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...odStatuVydavatele
  • NL - Nizozemsko
http://linked.open...ontrolniKodProRIV
  • [F203486D9D6C]
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  • Microelectronic Engineering
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...vavai/riv/projekt
http://linked.open...UplatneniVysledku
http://linked.open...v/svazekPeriodika
  • 88
http://linked.open...iv/tvurceVysledku
  • Bruncko, J.
  • Držík, M.
  • Husák, Miroslav
  • Vanko, G.
  • Jakovenko, Jiří
  • Kutiš, V.
  • Vallo, M.
  • Haščík, Š.
  • Lalinský, T.
http://linked.open...ain/vavai/riv/wos
  • 000293663400196
issn
  • 0167-9317
number of pages
http://bibframe.org/vocab/doi
  • 10.1016/j.mee.2010.12.013
http://localhost/t...ganizacniJednotka
  • 21230
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