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Description
| - This papers reports, for the first time, on a piezoelectric response investigation of AlGaN/GaN-based circular high electron mobility transistor (C-HEMT) structures, which can be potentially applied in new devices for dynamic pressure and stress sensing. We present the processing technology and a piezoelectric performance analysis of the C-HEMT devices. The analysis obtained experimentally is compared with the results of electro-mechanical simulation. The measurements and simulations revealed a good linearity in the piezoelectric response and excellent stress detection sensitivity that is independent from the frequency range measured.
- This papers reports, for the first time, on a piezoelectric response investigation of AlGaN/GaN-based circular high electron mobility transistor (C-HEMT) structures, which can be potentially applied in new devices for dynamic pressure and stress sensing. We present the processing technology and a piezoelectric performance analysis of the C-HEMT devices. The analysis obtained experimentally is compared with the results of electro-mechanical simulation. The measurements and simulations revealed a good linearity in the piezoelectric response and excellent stress detection sensitivity that is independent from the frequency range measured. (en)
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Title
| - Piezoelectric response of AlGaN/GaN-based circular-HEMT structures
- Piezoelectric response of AlGaN/GaN-based circular-HEMT structures (en)
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skos:prefLabel
| - Piezoelectric response of AlGaN/GaN-based circular-HEMT structures
- Piezoelectric response of AlGaN/GaN-based circular-HEMT structures (en)
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skos:notation
| - RIV/68407700:21230/11:00186058!RIV13-GA0-21230___
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http://linked.open...avai/riv/aktivita
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http://linked.open...avai/riv/aktivity
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http://linked.open...iv/cisloPeriodika
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http://linked.open...vai/riv/dodaniDat
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http://linked.open...aciTvurceVysledku
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http://linked.open.../riv/druhVysledku
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http://linked.open...iv/duvernostUdaju
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http://linked.open...titaPredkladatele
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http://linked.open...dnocenehoVysledku
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http://linked.open...ai/riv/idVysledku
| - RIV/68407700:21230/11:00186058
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http://linked.open...riv/jazykVysledku
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http://linked.open.../riv/klicovaSlova
| - AlGaN/GaN; HEMT; Piezoelectric response; SiC; Stress sensor (en)
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http://linked.open.../riv/klicoveSlovo
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http://linked.open...odStatuVydavatele
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http://linked.open...ontrolniKodProRIV
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http://linked.open...i/riv/nazevZdroje
| - Microelectronic Engineering
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http://linked.open...in/vavai/riv/obor
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http://linked.open...ichTvurcuVysledku
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http://linked.open...cetTvurcuVysledku
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http://linked.open...vavai/riv/projekt
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http://linked.open...UplatneniVysledku
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http://linked.open...v/svazekPeriodika
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http://linked.open...iv/tvurceVysledku
| - Bruncko, J.
- Držík, M.
- Husák, Miroslav
- Vanko, G.
- Jakovenko, Jiří
- Kutiš, V.
- Vallo, M.
- Haščík, Š.
- Lalinský, T.
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http://linked.open...ain/vavai/riv/wos
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issn
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number of pages
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http://bibframe.org/vocab/doi
| - 10.1016/j.mee.2010.12.013
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http://localhost/t...ganizacniJednotka
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