About: Modelling of low energy ion sputtering from oxide surfaces

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	The main aim of this work is to present a way to estimate the values of surface binding energy for oxides. This is done by fitting results from the binary collisions approximation code Tridyn with data from the reactive sputtering processing curves, as well as the elemental composition obtained from x-ray photoelectron spectroscopy (XPS). Oxide targets of Al, Ti, V, Nb and Ta are studied. The obtained surface binding energies are then used to predict the partial sputtering yields. Anomalously high sputtering yield is observed for the TiO 2 target. This is attributed to the high sputtering yield of Ti lower oxides. Such an effect is not observed for the other studied metals. XPS measurement of the oxide targets confirms the formation of suboxides during ion bombardment as well as an oxygen deficient surface in the steady state. These effects are confirmed from the processing curves from the oxide targets showing an elevated sputtering rate in pure argon. The main aim of this work is to present a way to estimate the values of surface binding energy for oxides. This is done by fitting results from the binary collisions approximation code Tridyn with data from the reactive sputtering processing curves, as well as the elemental composition obtained from x-ray photoelectron spectroscopy (XPS). Oxide targets of Al, Ti, V, Nb and Ta are studied. The obtained surface binding energies are then used to predict the partial sputtering yields. Anomalously high sputtering yield is observed for the TiO 2 target. This is attributed to the high sputtering yield of Ti lower oxides. Such an effect is not observed for the other studied metals. XPS measurement of the oxide targets confirms the formation of suboxides during ion bombardment as well as an oxygen deficient surface in the steady state. These effects are confirmed from the processing curves from the oxide targets showing an elevated sputtering rate in pure argon. (en)
Title	Modelling of low energy ion sputtering from oxide surfaces Modelling of low energy ion sputtering from oxide surfaces (en)
skos:prefLabel	Modelling of low energy ion sputtering from oxide surfaces Modelling of low energy ion sputtering from oxide surfaces (en)
skos:notation	RIV/68407700:21230/10:00168118!RIV11-GA0-21230___
http://linked.open...avai/riv/aktivita	P
http://linked.open...avai/riv/aktivity	P(GAP108/10/0218)
http://linked.open...iv/cisloPeriodika	20
http://linked.open...vai/riv/dodaniDat	2011
http://linked.open...aciTvurceVysledku	Kubart, Tomáš
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	České vysoké učení technické v Praze / Fakulta elektrotechnická
http://linked.open...dnocenehoVysledku	271955
http://linked.open...ai/riv/idVysledku	RIV/68407700:21230/10:00168118
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	Tridyn; Sputtering; Surface binding energy; Reactive sputtering (en)
http://linked.open.../riv/klicoveSlovo	Reactive sputtering Surface binding energy Tridyn Sputtering
http://linked.open...odStatuVydavatele	GB - Spojené království Velké Británie a Severního Irska
http://linked.open...ontrolniKodProRIV	[A12A7E826BD3]
http://linked.open...i/riv/nazevZdroje	Journal of Physics D: Applied Physics
http://linked.open...in/vavai/riv/obor	BL
http://linked.open...ichTvurcuVysledku	1 (xsd:int)
http://linked.open...cetTvurcuVysledku	3 (xsd:int)
http://linked.open...vavai/riv/projekt	Advanced self-adaptive low friction coatings based on transition metal dichalcogenides alloyed with carbon
http://linked.open...UplatneniVysledku	2010
http://linked.open...v/svazekPeriodika	43
http://linked.open...iv/tvurceVysledku	Kubart, Tomáš Berg, S. Nyberg, T.
http://linked.open...ain/vavai/riv/wos	000277373400012
issn	0022-3727
number of pages	6 (xsd:int)
http://localhost/t...ganizacniJednotka	21230

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