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Description
  • Článek se zabývá procesem výroby senzorů a pasivních prvků v SOI technologii. Jednoduché tenzometry byly vyrobeny na SIMOX SOI substrátech. Planární induktory a kapacitory byly vyrobeny na Si/SiO2 substrátech s naprášenou AlCuSi metalizací. Zjišťovala se teplotní závislost základních parametrů. (cs)
  • This paper introduces the fabrication process of the sensors and other passive elements based on SOI technology. Simple passive elements (strain sensitive resistors - piezoresistors) were fabricated on SIMOX SOI substrates. Planar inductors and capacitors were fabricated on standard Si/SiO2 substrates with sputtered AlCuSi metallization. Basic parameter extraction and their temperature dependence were performed.
  • This paper introduces the fabrication process of the sensors and other passive elements based on SOI technology. Simple passive elements (strain sensitive resistors - piezoresistors) were fabricated on SIMOX SOI substrates. Planar inductors and capacitors were fabricated on standard Si/SiO2 substrates with sputtered AlCuSi metallization. Basic parameter extraction and their temperature dependence were performed. (en)
Title
  • Fabrication od Devices and Sensors Based on Silicon-on-Insulator Technology
  • Fabrication od Devices and Sensors Based on Silicon-on-Insulator Technology (en)
  • Výroba struktur a senzorů v technologii Silicon-on-Insulator (cs)
skos:prefLabel
  • Fabrication od Devices and Sensors Based on Silicon-on-Insulator Technology
  • Fabrication od Devices and Sensors Based on Silicon-on-Insulator Technology (en)
  • Výroba struktur a senzorů v technologii Silicon-on-Insulator (cs)
skos:notation
  • RIV/68407700:21230/08:03147704!RIV09-MSM-21230___
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • Z(MSM6840770015)
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 367535
http://linked.open...ai/riv/idVysledku
  • RIV/68407700:21230/08:03147704
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • SOI technology; passive elements; strain sensor (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...ontrolniKodProRIV
  • [CDB946F3185C]
http://linked.open...v/mistoKonaniAkce
  • Brno
http://linked.open...i/riv/mistoVydani
  • Brno
http://linked.open...i/riv/nazevZdroje
  • Electronics Devices and Systems Proceedings
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...UplatneniVysledku
http://linked.open...iv/tvurceVysledku
  • Bouřa, Adam
  • Husák, Miroslav
  • Kulha, Pavel
  • Kučera, M. K.
  • Mikulík, P. M.
  • Valenda, S. V.
http://linked.open...vavai/riv/typAkce
http://linked.open.../riv/zahajeniAkce
http://linked.open...n/vavai/riv/zamer
number of pages
http://purl.org/ne...btex#hasPublisher
  • Vysoké učení technické v Brně
https://schema.org/isbn
  • 978-80-214-3717-3
http://localhost/t...ganizacniJednotka
  • 21230
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