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Description
  • This paper discusses the design, simulation and fabrication of new Micromachined Thermal Hot Plates (MTHPs) based on GaAs, which were designed for Gas sensors. High sensitivity and low power are expected for present metal oxide Gas sensors, which generally work in high temperature mode (which is essential for chemical reactions to be performed between molecules of the specified gas and the surface of sensing material). Because low power consumption is required, even for operation temperatures in the range of 200 to 500 oC, high thermal isolation of these devices are necessary.
  • This paper discusses the design, simulation and fabrication of new Micromachined Thermal Hot Plates (MTHPs) based on GaAs, which were designed for Gas sensors. High sensitivity and low power are expected for present metal oxide Gas sensors, which generally work in high temperature mode (which is essential for chemical reactions to be performed between molecules of the specified gas and the surface of sensing material). Because low power consumption is required, even for operation temperatures in the range of 200 to 500 oC, high thermal isolation of these devices are necessary. (en)
  • This paper discusses the design, simulation and fabrication of new Micromachined Thermal (cs)
Title
  • Micromechanical GaAs Hot Plates for Gas Sensors
  • GaAs mikromechanická tepelná struktura pro senzory plynů (cs)
  • Micromechanical GaAs Hot Plates for Gas Sensors (en)
skos:prefLabel
  • Micromechanical GaAs Hot Plates for Gas Sensors
  • GaAs mikromechanická tepelná struktura pro senzory plynů (cs)
  • Micromechanical GaAs Hot Plates for Gas Sensors (en)
skos:notation
  • RIV/68407700:21230/07:03137182!RIV08-MSM-21230___
http://linked.open.../vavai/riv/strany
  • 84;92
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • Z(MSM6840770012)
http://linked.open...iv/cisloPeriodika
  • 10
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 433715
http://linked.open...ai/riv/idVysledku
  • RIV/68407700:21230/07:03137182
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • MEMS, Gas sensors (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...odStatuVydavatele
  • ES - Španělské království
http://linked.open...ontrolniKodProRIV
  • [19C251F39127]
http://linked.open...i/riv/nazevZdroje
  • Sensors and Transducers
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...UplatneniVysledku
http://linked.open...v/svazekPeriodika
  • 2007
http://linked.open...iv/tvurceVysledku
  • Husák, Miroslav
  • Jakovenko, Jiří
  • Drzik, M. D.
  • Lalinsky, T. L.
http://linked.open...n/vavai/riv/zamer
issn
  • 1726-5479
number of pages
http://localhost/t...ganizacniJednotka
  • 21230
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