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An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

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Description
  • Program communicates to the control units of the e-gun and ion source and register values of process variables. The pressure, gases flow, and temperature are gained from the measurement of the analog values by the card NI6221. Information in the digital and graphical form for the control of the implantation process is retrieved from the measured values. Program displays relations of the actual values and graphically displays their history. Program was created in the Borland C++ Builder environment.
  • Program communicates to the control units of the e-gun and ion source and register values of process variables. The pressure, gases flow, and temperature are gained from the measurement of the analog values by the card NI6221. Information in the digital and graphical form for the control of the implantation process is retrieved from the measured values. Program displays relations of the actual values and graphically displays their history. Program was created in the Borland C++ Builder environment. (en)
Title
  • Control of Process of Ion Implantation and Registration of Technological Parameters
  • Control of Process of Ion Implantation and Registration of Technological Parameters (en)
skos:prefLabel
  • Control of Process of Ion Implantation and Registration of Technological Parameters
  • Control of Process of Ion Implantation and Registration of Technological Parameters (en)
skos:notation
  • RIV/68407700:21220/10:00174782!RIV11-MSM-21220___
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • S, Z(MSM6840770012)
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...onomickeParametry
  • Nejsou stanoveny
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 252062
http://linked.open...ai/riv/idVysledku
  • RIV/68407700:21220/10:00174782
http://linked.open...terniIdentifikace
  • ASW 2
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • control of process; ion implantation; registration of technological parameters (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...ontrolniKodProRIV
  • [88D1C2529384]
http://linked.open.../licencniPoplatek
http://linked.open...okalizaceVysledku
  • Ústav fyziky Fakulty strojní ČVUT v Praze
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...UplatneniVysledku
http://linked.open...echnickeParametry
  • Automatizace a registrace procesu využívajícího iontové a elektronové svazky
http://linked.open...iv/tvurceVysledku
  • Černý, František
  • Horažďovský, Tomáš
  • Jech, Vladimír
  • Vlčák, Petr
http://linked.open...avai/riv/vlastnik
http://linked.open...itiJinymSubjektem
http://linked.open...n/vavai/riv/zamer
http://localhost/t...ganizacniJednotka
  • 21220
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