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Description
  • Program controls movement of the mechanical manipulator step motors carrying Faraday probe (FP) for the measurement of the ion current density in the beam. The measurement of the current by the FP is made simultaneously by the measurement of the current flowing through the sample holder and by the measurement of the current that is provided by the high-voltage power supply. The program retrieves the rest of the process variables from the control unit that controls the pumping of the working chamber and from the measurements of the analog signals made by the general-purpose AD/DA card PCL-812.
  • Program controls movement of the mechanical manipulator step motors carrying Faraday probe (FP) for the measurement of the ion current density in the beam. The measurement of the current by the FP is made simultaneously by the measurement of the current flowing through the sample holder and by the measurement of the current that is provided by the high-voltage power supply. The program retrieves the rest of the process variables from the control unit that controls the pumping of the working chamber and from the measurements of the analog signals made by the general-purpose AD/DA card PCL-812. (en)
Title
  • Control of scanning of ion current density
  • Control of scanning of ion current density (en)
skos:prefLabel
  • Control of scanning of ion current density
  • Control of scanning of ion current density (en)
skos:notation
  • RIV/68407700:21220/10:00174422!RIV11-MSM-21220___
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • S, Z(MSM6840770012)
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
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  • Nejsou stanoveny
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  • 252065
http://linked.open...ai/riv/idVysledku
  • RIV/68407700:21220/10:00174422
http://linked.open...terniIdentifikace
  • ASW 1
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • ion current density; Faraday probe; control of scanning (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...ontrolniKodProRIV
  • [5B3A1838E1B9]
http://linked.open.../licencniPoplatek
http://linked.open...okalizaceVysledku
  • Ústav fyziky Fakulty strojní ČVUT v Praze
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...UplatneniVysledku
http://linked.open...echnickeParametry
  • Skenování iontového svazku Faradayovou komůrkou podstatně zpřesňuje procesní parametry iontové implantace
http://linked.open...iv/tvurceVysledku
  • Černý, František
  • Horažďovský, Tomáš
  • Jech, Vladimír
  • Vlčák, Petr
http://linked.open...avai/riv/vlastnik
http://linked.open...itiJinymSubjektem
http://linked.open...n/vavai/riv/zamer
http://localhost/t...ganizacniJednotka
  • 21220
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