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  • From chromium based layers there were selected chromium oxide and chromium nitride layers. Metal organic chemical vapour deposition methods of layer preparation were used. The oxide layers were prepared from acetylacetonate of chromium. The nitride layers were prepared from the mixture of bis(benzene)chromium and ammonia. The temperature of deposition was carried out in the temperature range 350-6500C. The oxide layers prepared at the temperatures below 4500C were amorphous and the layers prepared at the temperature 5500C and above were generally polycrystalline. The hardness of the deposited chromium oxide layers on silicon substrates was 18-25 GPa. The hardness of the deposited chromium nitride layers on silicon substrates was 15-20GPa.
  • From chromium based layers there were selected chromium oxide and chromium nitride layers. Metal organic chemical vapour deposition methods of layer preparation were used. The oxide layers were prepared from acetylacetonate of chromium. The nitride layers were prepared from the mixture of bis(benzene)chromium and ammonia. The temperature of deposition was carried out in the temperature range 350-6500C. The oxide layers prepared at the temperatures below 4500C were amorphous and the layers prepared at the temperature 5500C and above were generally polycrystalline. The hardness of the deposited chromium oxide layers on silicon substrates was 18-25 GPa. The hardness of the deposited chromium nitride layers on silicon substrates was 15-20GPa. (en)
Title
  • Thin Films on the Basis of Chromium and Their Selected Properties
  • Thin Films on the Basis of Chromium and Their Selected Properties (en)
skos:prefLabel
  • Thin Films on the Basis of Chromium and Their Selected Properties
  • Thin Films on the Basis of Chromium and Their Selected Properties (en)
skos:notation
  • RIV/68407700:21220/04:00104398!RIV11-MSM-21220___
http://linked.open...avai/riv/aktivita
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  • Z(MSM 210000012)
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  • 590280
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  • RIV/68407700:21220/04:00104398
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  • Chromium oxide; Silicon substrate; chromium nitride; coating (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...ontrolniKodProRIV
  • [E86E49EF36D3]
http://linked.open...v/mistoKonaniAkce
  • Tromso - Harstad
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  • Trondheim
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  • Proceedings of the 11th Nordic Symposium on Tribology NORDTRIB 2004
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  • Černý, František
  • Suchánek, Jan
  • Semenko, Serhiy
  • Gurovič, Ján
  • Palamarčuk, Dmytro
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http://linked.open.../riv/zahajeniAkce
http://linked.open...n/vavai/riv/zamer
number of pages
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  • Norwegian University of Science and Technology
http://localhost/t...ganizacniJednotka
  • 21220
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