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  • White-light interferometry is an established and proven method for the measurement of the shape of objects. White-light interferometry is able to measure the shape of objects with optically smooth as well as optically rough surfaces. A major disadvantage of white-light interferometry is its low scanning velocity and the long measurement time related. We present a system that measures the shape of object with optically rough surface and can achieve the scanning velocity up to 100 μm/s with a standard frame rate of 25 Hz. The experimental results are shown.
  • White-light interferometry is an established and proven method for the measurement of the shape of objects. White-light interferometry is able to measure the shape of objects with optically smooth as well as optically rough surfaces. A major disadvantage of white-light interferometry is its low scanning velocity and the long measurement time related. We present a system that measures the shape of object with optically rough surface and can achieve the scanning velocity up to 100 μm/s with a standard frame rate of 25 Hz. The experimental results are shown. (en)
Title
  • White-light interferometry with high measurement speed
  • White-light interferometry with high measurement speed (en)
skos:prefLabel
  • White-light interferometry with high measurement speed
  • White-light interferometry with high measurement speed (en)
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  • RIV/68378271:_____/14:00440855!RIV15-GA0-68378271
http://linked.open...avai/riv/aktivita
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  • I, P(GA13-12301S)
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  • 56170
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  • RIV/68378271:_____/14:00440855
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  • white-light interferometry; high measurement speed; undersampling; Hilbert transform (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...ontrolniKodProRIV
  • [3FA3070897D3]
http://linked.open...v/mistoKonaniAkce
  • Jelenia Góra
http://linked.open...i/riv/mistoVydani
  • Bellingham
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  • Polish-Slovak-Czech Optical Conference on Wave and Quantum Aspects of Contemporary Optics /19./
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  • Pavlíček, Pavel
  • Svak, V.
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issn
  • 0277-786X
number of pages
http://bibframe.org/vocab/doi
  • 10.1117/12.2084973
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  • SPIE
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  • 9781628415568
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