About: Low temperature diamond growth

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	The present chapter focuses on the low temperature diamond growth from technological and practical point of view. The LTDG process is divided in two strategies based i) on the modification of the deposition systems and ii) on the change of gas chemistry. State of the art of each strategy and involved fundamental growth processes are reviewed. Among the discussed diamond growth processes, microwave surface wave plasma in linear antenna configuration with oxygen containing gas mixture is shown as the most promising process for the LTDG over large areas with high optical and electronic grade material. The growth phenomena observed in the linear antenna microwave plasma provide a simple way to control nano- and poly-crystalline diamond character. A practical comparison between focused and linear antenna microwave plasma is presented on several key studies which utilize the LTDG on amorphous silicon, glass, germanium and optical elements used for IR spectroscopy. The present chapter focuses on the low temperature diamond growth from technological and practical point of view. The LTDG process is divided in two strategies based i) on the modification of the deposition systems and ii) on the change of gas chemistry. State of the art of each strategy and involved fundamental growth processes are reviewed. Among the discussed diamond growth processes, microwave surface wave plasma in linear antenna configuration with oxygen containing gas mixture is shown as the most promising process for the LTDG over large areas with high optical and electronic grade material. The growth phenomena observed in the linear antenna microwave plasma provide a simple way to control nano- and poly-crystalline diamond character. A practical comparison between focused and linear antenna microwave plasma is presented on several key studies which utilize the LTDG on amorphous silicon, glass, germanium and optical elements used for IR spectroscopy. (en)
Title	Low temperature diamond growth Low temperature diamond growth (en)
skos:prefLabel	Low temperature diamond growth Low temperature diamond growth (en)
skos:notation	RIV/68378271:_____/14:00432021!RIV15-GA0-68378271
http://linked.open...avai/riv/aktivita	I P
http://linked.open...avai/riv/aktivity	I, P(GBP108/12/G108)
http://linked.open...vai/riv/dodaniDat	2015
http://linked.open...aciTvurceVysledku	Remeš, Zdeněk Kromka, Alexander Rezek, Bohuslav Potocký, Štěpán Babchenko, Oleg Ižák, Tibor Verveniotis, Elisseos Kozak, Halyna
http://linked.open.../riv/druhVysledku	C - Kapitola v knize
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Fyzikální ústav AV ČR, v. v. i.
http://linked.open...dnocenehoVysledku	26685
http://linked.open...ai/riv/idVysledku	RIV/68378271:_____/14:00432021
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	diamond film; pulsed linear antenna MWCVD; low temperature deposition; temperature sensitive substrates (en)
http://linked.open.../riv/klicoveSlovo	diamond film pulsed linear antenna MWCVD temperature sensitive substrates low temperature deposition
http://linked.open...ontrolniKodProRIV	[E2EE7C74ACFC]
http://linked.open...i/riv/mistoVydani	Cambridge
http://linked.open...i/riv/nazevZdroje	Nanodiamond
http://linked.open...in/vavai/riv/obor	BM
http://linked.open...ichTvurcuVysledku	8 (xsd:int)
http://linked.open...v/pocetStranKnihy	530 (xsd:int)
http://linked.open...cetTvurcuVysledku	8 (xsd:int)
http://linked.open...vavai/riv/projekt	Preparation, modification and characterization of materials by radiation
http://linked.open...UplatneniVysledku	2014
http://linked.open...iv/tvurceVysledku	Babchenko, Oleg Kromka, Alexander Rezek, Bohuslav Ižák, Tibor Remeš, Zdeněk Verveniotis, Elisseos Potocký, Štěpán Kozak, Halyna
number of pages	53 (xsd:int)
http://bibframe.org/vocab/doi	10.1039/9781849737616-00290
http://purl.org/ne...btex#hasPublisher	The Royal Society of Chemistry
https://schema.org/isbn	978-1-84973-639-8

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