About: Effect of air annealing on mechanical properties and structure of SiCxNy magnetron sputtered films

Facets (new session)
Description
Metadata
Settings
- owl:sameAs
- Inference Rule:

About: Effect of air annealing on mechanical properties and structure of SiCxNy magnetron sputtered films Goto Sponge NotDistinct Permalink

An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

Attributes	Values
rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	Amorphous SiCxNy films (of 2.2–2.7 μm) were deposited on Si(111) substrates by reactive DC magnetron sputtering. The SiC target with small excess of carbon was sputtered at various nitrogen/argon gas flow ratios (0–0.48).The as-deposited films were additionally annealed at temperatures of 700, 900 and 1100 °C in the air during 30 min and at 900 °C in vacuum during 1 h. The depth profile of hardness and elastic modulus (nanoindentation), change of the film thickness, film composition and structure (Raman and Infrared spectroscopy) were investigated in dependence on annealing temperature and content of nitrogen. The hardness of the as-deposited films decreases with the growth of nitrogen/argon flow ratio.Air annealing at 1100 °C leads to intensive surface oxidation and formation of graphite-like structure in carbon clusters of inner layers. Amorphous SiCxNy films (of 2.2–2.7 μm) were deposited on Si(111) substrates by reactive DC magnetron sputtering. The SiC target with small excess of carbon was sputtered at various nitrogen/argon gas flow ratios (0–0.48).The as-deposited films were additionally annealed at temperatures of 700, 900 and 1100 °C in the air during 30 min and at 900 °C in vacuum during 1 h. The depth profile of hardness and elastic modulus (nanoindentation), change of the film thickness, film composition and structure (Raman and Infrared spectroscopy) were investigated in dependence on annealing temperature and content of nitrogen. The hardness of the as-deposited films decreases with the growth of nitrogen/argon flow ratio.Air annealing at 1100 °C leads to intensive surface oxidation and formation of graphite-like structure in carbon clusters of inner layers. (en)
Title	Effect of air annealing on mechanical properties and structure of SiCxNy magnetron sputtered films Effect of air annealing on mechanical properties and structure of SiCxNy magnetron sputtered films (en)
skos:prefLabel	Effect of air annealing on mechanical properties and structure of SiCxNy magnetron sputtered films Effect of air annealing on mechanical properties and structure of SiCxNy magnetron sputtered films (en)
skos:notation	RIV/68378271:_____/14:00427277!RIV15-GA0-68378271
http://linked.open...avai/riv/aktivita	I P
http://linked.open...avai/riv/aktivity	I, P(ED2.1.00/03.0058), P(GAP108/12/1941), P(TA03010743)
http://linked.open...iv/cisloPeriodika	FEB
http://linked.open...vai/riv/dodaniDat	2015
http://linked.open...aciTvurceVysledku	Čtvrtlík, Radim Boháč, Petr Vorlíček, Vladimír Železný, Vladimír
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Fyzikální ústav AV ČR, v. v. i.
http://linked.open...dnocenehoVysledku	13110
http://linked.open...ai/riv/idVysledku	RIV/68378271:_____/14:00427277
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	SiCN films; annealing; temperature stability; mechanical properties; structure (en)
http://linked.open.../riv/klicoveSlovo	SiCN films annealing mechanical properties structure temperature stability
http://linked.open...odStatuVydavatele	CH - Švýcarská konfederace
http://linked.open...ontrolniKodProRIV	[D4E58E25CB11]
http://linked.open...i/riv/nazevZdroje	Surface and Coatings Technology
http://linked.open...in/vavai/riv/obor	BM
http://linked.open...ichTvurcuVysledku	4 (xsd:int)
http://linked.open...cetTvurcuVysledku	6 (xsd:int)
http://linked.open...vavai/riv/projekt	Systems for acoustic emission characterization of mechanical properties and stability of thin film structures and functional surfaces Regional Centre of Advanced Technologies and Materials Advanced preparation methods and experimental research of doped perovskite thin-film systems for high density energy storages
http://linked.open...UplatneniVysledku	2014
http://linked.open...v/svazekPeriodika	240
http://linked.open...iv/tvurceVysledku	Jastrabík, L. Boháč, Petr Vorlíček, Vladimír Čtvrtlík, Radim Železný, Vladimír Kulikovsky, V.
http://linked.open...ain/vavai/riv/wos	000331989900011
issn	0257-8972
number of pages	10 (xsd:int)
http://bibframe.org/vocab/doi	10.1016/j.surfcoat.2013.12.017

Faceted Search & Find service v1.16.118 as of Jun 21 2024

Alternative Linked Data Documents: ODE Content Formats:

RDF

ODATA

Microdata

About

OpenLink Virtuoso version 07.20.3240 as of Jun 21 2024, on Linux (x86_64-pc-linux-gnu), Single-Server Edition (126 GB total memory, 58 GB memory in use)
Data on this page belongs to its respective rights holders.
Virtuoso Faceted Browser Copyright © 2009-2024 OpenLink Software