About: Investigation of ionized metal flux fraction in HiPIMS discharges with Ti and Ni targets

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An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	Ionized metal flux fractions in high power impulsemagnetron sputtering (HiPIMS) were analyzed by a combination of a retarding field analyzer and a quartz crystal microbalance (QCM). Two target materials, Ni and Ti, were studied in an Ar atmosphere. In the case of Ti, the reactive (Ar + O2) mode was also investigated. Ionized metal flux fractions of up to 50% for Ni were observed at a pulse power density of 1 kW cm2. Ionized metal flux fractions in high power impulsemagnetron sputtering (HiPIMS) were analyzed by a combination of a retarding field analyzer and a quartz crystal microbalance (QCM). Two target materials, Ni and Ti, were studied in an Ar atmosphere. In the case of Ti, the reactive (Ar + O2) mode was also investigated. Ionized metal flux fractions of up to 50% for Ni were observed at a pulse power density of 1 kW cm2. (en)
Title	Investigation of ionized metal flux fraction in HiPIMS discharges with Ti and Ni targets Investigation of ionized metal flux fraction in HiPIMS discharges with Ti and Ni targets (en)
skos:prefLabel	Investigation of ionized metal flux fraction in HiPIMS discharges with Ti and Ni targets Investigation of ionized metal flux fraction in HiPIMS discharges with Ti and Ni targets (en)
skos:notation	RIV/68378271:_____/14:00427184!RIV15-GA0-68378271
http://linked.open...avai/riv/aktivita	I P
http://linked.open...avai/riv/aktivity	I, P(GAP108/12/2104), P(LD12002), P(LH12043)
http://linked.open...iv/cisloPeriodika	JAN
http://linked.open...vai/riv/dodaniDat	2015
http://linked.open...aciTvurceVysledku	Čada, Martin Hubička, Zdeněk
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Fyzikální ústav AV ČR, v. v. i.
http://linked.open...dnocenehoVysledku	22735
http://linked.open...ai/riv/idVysledku	RIV/68378271:_____/14:00427184
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	HiPIMS; reactive sputtering; ionized flux fraction (en)
http://linked.open.../riv/klicoveSlovo	reactive sputtering ionized flux fraction HiPIMS
http://linked.open...odStatuVydavatele	CH - Švýcarská konfederace
http://linked.open...ontrolniKodProRIV	[5BE3A2A8EC08]
http://linked.open...i/riv/nazevZdroje	Surface and Coatings Technology
http://linked.open...in/vavai/riv/obor	BL
http://linked.open...ichTvurcuVysledku	2 (xsd:int)
http://linked.open...cetTvurcuVysledku	4 (xsd:int)
http://linked.open...vavai/riv/projekt	Investigation of hybrid HiPIMS systems for deposition of nanostructured thin films A Study of thin films systems based on Iron Pyrite (FeS2) for Photonic Applications. Advanced semiconductor materials for photoelectrochemical water splitting
http://linked.open...UplatneniVysledku	2014
http://linked.open...v/svazekPeriodika	238
http://linked.open...iv/tvurceVysledku	Hubička, Zdeněk Čada, Martin Lundin, D. Kubart, T.
http://linked.open...ain/vavai/riv/wos	000331028200018
issn	0257-8972
number of pages	6 (xsd:int)
http://bibframe.org/vocab/doi	10.1016/j.surfcoat.2013.10.064

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