About: Performances of microwave plasma generation in linear antenna configuration

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An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	The versatility of linear antenna MW plasma system for growth of carbon allotropes was previously shown. Utilization of commercially available deposition systems brings advantages of strong technological background, cost effectiveness and usually easy further up-scaling. On the other hand, these systems need special modifications and deeper understanding of ongoing processes when used for scientific research. In this article we studied the behavior of plasma generation by two independent pulsed MW generators. We have shown how to overcome a problem of missing trigger outputs from the pulsed MW generators for realization of time resolved measurements. We have also shown that in the studied system exist the 33 min period during which originally synchronized pulses detune each from other and synchronize back creating also an interval of time when plasma does not extinguish. The versatility of linear antenna MW plasma system for growth of carbon allotropes was previously shown. Utilization of commercially available deposition systems brings advantages of strong technological background, cost effectiveness and usually easy further up-scaling. On the other hand, these systems need special modifications and deeper understanding of ongoing processes when used for scientific research. In this article we studied the behavior of plasma generation by two independent pulsed MW generators. We have shown how to overcome a problem of missing trigger outputs from the pulsed MW generators for realization of time resolved measurements. We have also shown that in the studied system exist the 33 min period during which originally synchronized pulses detune each from other and synchronize back creating also an interval of time when plasma does not extinguish. (en)
Title	Performances of microwave plasma generation in linear antenna configuration Performances of microwave plasma generation in linear antenna configuration (en)
skos:prefLabel	Performances of microwave plasma generation in linear antenna configuration Performances of microwave plasma generation in linear antenna configuration (en)
skos:notation	RIV/68378271:_____/13:00424334!RIV14-GA0-68378271
http://linked.open...avai/riv/aktivita	I P
http://linked.open...avai/riv/aktivity	I, P(GAP205/12/0908), P(TA01011740)
http://linked.open...vai/riv/dodaniDat	2014
http://linked.open...aciTvurceVysledku	Rezek, Ondřej Čada, Martin Kromka, Alexander Potocký, Štěpán Varga, Marián Babchenko, Oleg Ižák, Tibor
http://linked.open.../riv/druhVysledku	D - Článek ve sborníku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Fyzikální ústav AV ČR, v. v. i.
http://linked.open...dnocenehoVysledku	95793
http://linked.open...ai/riv/idVysledku	RIV/68378271:_____/13:00424334
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	microwave plasma; linear antena; CVD deposition (en)
http://linked.open.../riv/klicoveSlovo	linear antena CVD deposition microwave plasma
http://linked.open...ontrolniKodProRIV	[CCFF1A496D11]
http://linked.open...v/mistoKonaniAkce	Štrbské Pleso
http://linked.open...i/riv/mistoVydani	Bratislava
http://linked.open...i/riv/nazevZdroje	Perspektívne vákuové metódy a technológie (Perspective vacuum methods and technologies)
http://linked.open...in/vavai/riv/obor	BL
http://linked.open...ichTvurcuVysledku	7 (xsd:int)
http://linked.open...cetTvurcuVysledku	7 (xsd:int)
http://linked.open...vavai/riv/projekt	Advanced experimental research of large area microwave plasma system for deposition of nanocrystalline diamond films Hybrid high-density low-temperature microwave plasma sources in matrix configuration suitable for growth of advanced materials and their (nano) composites on 2D and 3D substrates
http://linked.open...UplatneniVysledku	2013
http://linked.open...iv/tvurceVysledku	Babchenko, Oleg Kromka, Alexander Rezek, Ondřej Ižák, Tibor Čada, Martin Potocký, Štěpán Varga, Marián
http://linked.open...vavai/riv/typAkce	EUR - Evropská
http://linked.open.../riv/zahajeniAkce	2013-10-10 (xsd:date)
number of pages	5 (xsd:int)
http://purl.org/ne...btex#hasPublisher	Slovenská vákuová spoločnosť
https://schema.org/isbn	978-80-971179-2-4

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