About: Angle-resolved investigation of ion dynamics in high power impulse magnetron sputtering deposition system

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About: Angle-resolved investigation of ion dynamics in high power impulse magnetron sputtering deposition system Goto Sponge NotDistinct Permalink

An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

Attributes	Values
rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
rdfs:seeAlso	http://www.sciencedirect.com/science/article/pii/S0040609013011127
Description	The high power impulse magnetron sputtering deposition system (HiPIMS) equipped with 5 cm in diameter titanium target has been investigated by means of time-resolved modified Katsumata probe. The probe allows for determination of the ion velocity distribution function. Compact construction of modified Katsumata probe allows us to place the probe in an arbitrary position with respect to planar magnetron. The present construction of modified Katsumata probe allows reaching the acceptance angle of about 15°. The ion velocity distribution function (IVDF) in forward direction is then directly proportional to the derivative of measured ion current with respect to the retarding potential. An angle-resolved study of HiPIMS system operating in the reactive atmosphere has been carried out. The effect of oxygen partial pressure on measured IVDF at different angles within the plasma pulse has been investigated. The high power impulse magnetron sputtering deposition system (HiPIMS) equipped with 5 cm in diameter titanium target has been investigated by means of time-resolved modified Katsumata probe. The probe allows for determination of the ion velocity distribution function. Compact construction of modified Katsumata probe allows us to place the probe in an arbitrary position with respect to planar magnetron. The present construction of modified Katsumata probe allows reaching the acceptance angle of about 15°. The ion velocity distribution function (IVDF) in forward direction is then directly proportional to the derivative of measured ion current with respect to the retarding potential. An angle-resolved study of HiPIMS system operating in the reactive atmosphere has been carried out. The effect of oxygen partial pressure on measured IVDF at different angles within the plasma pulse has been investigated. (en)
Title	Angle-resolved investigation of ion dynamics in high power impulse magnetron sputtering deposition system Angle-resolved investigation of ion dynamics in high power impulse magnetron sputtering deposition system (en)
skos:prefLabel	Angle-resolved investigation of ion dynamics in high power impulse magnetron sputtering deposition system Angle-resolved investigation of ion dynamics in high power impulse magnetron sputtering deposition system (en)
skos:notation	RIV/68378271:_____/13:00421856!RIV14-MSM-68378271
http://linked.open...avai/riv/aktivita	I P
http://linked.open...avai/riv/aktivity	I, P(LD12002)
http://linked.open...iv/cisloPeriodika	DEC
http://linked.open...vai/riv/dodaniDat	2014
http://linked.open...aciTvurceVysledku	Čada, Martin Hubička, Zdeněk Adámek, Petr Olejníček, Jiří Kment, Štěpán
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Fyzikální ústav AV ČR, v. v. i.
http://linked.open...dnocenehoVysledku	61256
http://linked.open...ai/riv/idVysledku	RIV/68378271:_____/13:00421856
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	HiPIMS; titania; Katsumata probe; ion sensitive probe; IVDF; angular resolution (en)
http://linked.open.../riv/klicoveSlovo	angular resolution ion sensitive probe Katsumata probe HiPIMS IVDF titania
http://linked.open...odStatuVydavatele	CH - Švýcarská konfederace
http://linked.open...ontrolniKodProRIV	[F9C248FDE44C]
http://linked.open...i/riv/nazevZdroje	Thin Solid Films
http://linked.open...in/vavai/riv/obor	BL
http://linked.open...ichTvurcuVysledku	5 (xsd:int)
http://linked.open...cetTvurcuVysledku	7 (xsd:int)
http://linked.open...vavai/riv/projekt	Investigation of hybrid HiPIMS systems for deposition of nanostructured thin films
http://linked.open...UplatneniVysledku	2013
http://linked.open...v/svazekPeriodika	549
http://linked.open...iv/tvurceVysledku	Adámek, Petr Kment, Štěpán Olejníček, Jiří Hubička, Zdeněk Hippler, R. Straňák, V. Čada, Martin
http://linked.open...ain/vavai/riv/wos	000327537100033
issn	0040-6090
number of pages	7 (xsd:int)
http://bibframe.org/vocab/doi	10.1016/j.tsf.2013.06.061

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