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Description
| - In this work, the diamond nucleation is studied using two different deposition systems: (i) focused microwave plasma (labeled as “hot plasma) and (ii) pulsed-linear antenna microwave plasma (“cold plasma). For the hot plasma, the influence of CH4 concentration in the hydrogen rich gas mixture on the self nucleation is investigated. It is found that higher CH4 concentration leads to increased diamond nucle- ation density, but also the amount of sp2 carbon bonds increases within the deposits. In the cold plasma, we investigate the influence of CO2 addition into CH4/H2 and total process pressure. The nucleation density (Nd) typical for non-treated substrates is improved by four orders in cold plasma thanks to increased CH4 and CO2 concentrations. The highest nucleation density in the hot plasma system is still one order lower Moreover, in cold plasma a bimodal distribution function of diamond clusters is observed for low ratios of CO2/H2.
- In this work, the diamond nucleation is studied using two different deposition systems: (i) focused microwave plasma (labeled as “hot plasma) and (ii) pulsed-linear antenna microwave plasma (“cold plasma). For the hot plasma, the influence of CH4 concentration in the hydrogen rich gas mixture on the self nucleation is investigated. It is found that higher CH4 concentration leads to increased diamond nucle- ation density, but also the amount of sp2 carbon bonds increases within the deposits. In the cold plasma, we investigate the influence of CO2 addition into CH4/H2 and total process pressure. The nucleation density (Nd) typical for non-treated substrates is improved by four orders in cold plasma thanks to increased CH4 and CO2 concentrations. The highest nucleation density in the hot plasma system is still one order lower Moreover, in cold plasma a bimodal distribution function of diamond clusters is observed for low ratios of CO2/H2. (en)
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Title
| - Enhanced spontaneous nucleation of diamond nuclei in hot and cold microwave plasma systems
- Enhanced spontaneous nucleation of diamond nuclei in hot and cold microwave plasma systems (en)
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skos:prefLabel
| - Enhanced spontaneous nucleation of diamond nuclei in hot and cold microwave plasma systems
- Enhanced spontaneous nucleation of diamond nuclei in hot and cold microwave plasma systems (en)
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skos:notation
| - RIV/68378271:_____/13:00421423!RIV14-GA0-68378271
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http://linked.open...avai/riv/aktivita
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http://linked.open...avai/riv/aktivity
| - I, P(GAP108/12/0891), P(GBP108/12/G108)
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http://linked.open...iv/cisloPeriodika
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http://linked.open...vai/riv/dodaniDat
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http://linked.open...aciTvurceVysledku
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http://linked.open.../riv/druhVysledku
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http://linked.open...iv/duvernostUdaju
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http://linked.open...titaPredkladatele
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http://linked.open...dnocenehoVysledku
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http://linked.open...ai/riv/idVysledku
| - RIV/68378271:_____/13:00421423
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http://linked.open...riv/jazykVysledku
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http://linked.open.../riv/klicovaSlova
| - bimodal distribution function; focused microwave CVD; linear antenna microwave CVD; polycrystalline diamond; films; self-nucleation (en)
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http://linked.open.../riv/klicoveSlovo
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http://linked.open...odStatuVydavatele
| - DE - Spolková republika Německo
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http://linked.open...ontrolniKodProRIV
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http://linked.open...i/riv/nazevZdroje
| - Physica Status Solidi B-Basic Solid State Physics
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http://linked.open...in/vavai/riv/obor
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http://linked.open...ichTvurcuVysledku
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http://linked.open...cetTvurcuVysledku
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http://linked.open...vavai/riv/projekt
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http://linked.open...UplatneniVysledku
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http://linked.open...v/svazekPeriodika
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http://linked.open...iv/tvurceVysledku
| - Demo, Pavel
- Kromka, Alexander
- Sveshnikov, Alexey
- Ižák, Tibor
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http://linked.open...ain/vavai/riv/wos
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issn
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number of pages
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http://bibframe.org/vocab/doi
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