About: Mechanical properties and structure of TiO2 films deposited on quartz and silicon substrates

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	TiO2 filmswere deposited by reactive direct currentmagnetron sputtering on conductive and semiconductive Si as well as on dielectric quartz substrates at different negative substrate biases generated by radio-frequency (RF) power applied to the substrate holder. The mechanical properties of the films (depth sensing indentation) were examined in dependence on the film structure (X-ray diffraction and Raman spectroscopy). Phase analysis and hardness data imply that RF induced self-bias on the upper surface of quartz substrate is smaller in comparison to that on the surface of the semiconductive and especially conductive Si substrate. The rutile phase still grows after the RF power is switched off. The rutile grain size increaseswhile hardness decreases in this case. Micro-Raman spectroscopy of residual indents in the films with anatase structure points out on the more dense high pressure TiO2-II structure formed during the indentation. TiO2 filmswere deposited by reactive direct currentmagnetron sputtering on conductive and semiconductive Si as well as on dielectric quartz substrates at different negative substrate biases generated by radio-frequency (RF) power applied to the substrate holder. The mechanical properties of the films (depth sensing indentation) were examined in dependence on the film structure (X-ray diffraction and Raman spectroscopy). Phase analysis and hardness data imply that RF induced self-bias on the upper surface of quartz substrate is smaller in comparison to that on the surface of the semiconductive and especially conductive Si substrate. The rutile phase still grows after the RF power is switched off. The rutile grain size increaseswhile hardness decreases in this case. Micro-Raman spectroscopy of residual indents in the films with anatase structure points out on the more dense high pressure TiO2-II structure formed during the indentation. (en)
Title	Mechanical properties and structure of TiO2 films deposited on quartz and silicon substrates Mechanical properties and structure of TiO2 films deposited on quartz and silicon substrates (en)
skos:prefLabel	Mechanical properties and structure of TiO2 films deposited on quartz and silicon substrates Mechanical properties and structure of TiO2 films deposited on quartz and silicon substrates (en)
skos:notation	RIV/68378271:_____/13:00396224!RIV14-GA0-68378271
http://linked.open...avai/riv/aktivita	I P
http://linked.open...avai/riv/aktivity	I, P(ED2.1.00/03.0058), P(EE2.3.20.0017), P(GAP108/12/1941), P(TA03010743)
http://linked.open...iv/cisloPeriodika	Sept
http://linked.open...vai/riv/dodaniDat	2014
http://linked.open...aciTvurceVysledku	Boháč, Petr Vorlíček, Vladimír Kulykovskyy, Valeriy
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Fyzikální ústav AV ČR, v. v. i.
http://linked.open...dnocenehoVysledku	86958
http://linked.open...ai/riv/idVysledku	RIV/68378271:_____/13:00396224
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	TiO2 films; ion bombardment; film structure; nanoindentation; phase transformation (en)
http://linked.open.../riv/klicoveSlovo	TiO2 films nanoindentation ion bombardment film structure phase transformation
http://linked.open...odStatuVydavatele	CH - Švýcarská konfederace
http://linked.open...ontrolniKodProRIV	[83977CC889BA]
http://linked.open...i/riv/nazevZdroje	Thin Solid Films
http://linked.open...in/vavai/riv/obor	BH
http://linked.open...ichTvurcuVysledku	3 (xsd:int)
http://linked.open...cetTvurcuVysledku	6 (xsd:int)
http://linked.open...vavai/riv/projekt	Systems for acoustic emission characterization of mechanical properties and stability of thin film structures and functional surfaces Regional Centre of Advanced Technologies and Materials Research team development of the Regional Centre of Advanced Technologies and Materials Advanced preparation methods and experimental research of doped perovskite thin-film systems for high density energy storages
http://linked.open...UplatneniVysledku	2013
http://linked.open...v/svazekPeriodika	542
http://linked.open...iv/tvurceVysledku	Filip, J. Jastrabík, L. Boháč, Petr Kulykovskyy, Valeriy Vorlíček, Vladimír Čtvrtlík, R.
http://linked.open...ain/vavai/riv/wos	000323859400015
issn	0040-6090
number of pages	9 (xsd:int)
http://bibframe.org/vocab/doi	10.1016/j.tsf.2013.06.070

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