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Description
| - In this work, we investigate the composition profile of nanocrystalline Pb(Zr,Ti)O3 (PZT) thin films deposited by means of reactive magnetron sputtering from 200 mm diameter metallic targets (Pb, Ti, Zr). High-power pulse sputtering has been employed for alternatively the Zr- or Ti-target. Composition analysis and profiling was performed by means of X-ray photoelectron spectroscopy (XPS) and Rutherford backscattering (RBS). RBS data was recalibrated to exclude hydrogen content not determined by XPS. Advantages and drawbacks of both methods for PZT composition profiling are discussed.
- In this work, we investigate the composition profile of nanocrystalline Pb(Zr,Ti)O3 (PZT) thin films deposited by means of reactive magnetron sputtering from 200 mm diameter metallic targets (Pb, Ti, Zr). High-power pulse sputtering has been employed for alternatively the Zr- or Ti-target. Composition analysis and profiling was performed by means of X-ray photoelectron spectroscopy (XPS) and Rutherford backscattering (RBS). RBS data was recalibrated to exclude hydrogen content not determined by XPS. Advantages and drawbacks of both methods for PZT composition profiling are discussed. (en)
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Title
| - Composition profiling of piezoelectric PZT thin films deposited onto Cu coated polymer substrates
- Composition profiling of piezoelectric PZT thin films deposited onto Cu coated polymer substrates (en)
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skos:prefLabel
| - Composition profiling of piezoelectric PZT thin films deposited onto Cu coated polymer substrates
- Composition profiling of piezoelectric PZT thin films deposited onto Cu coated polymer substrates (en)
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skos:notation
| - RIV/68378271:_____/12:00391185!RIV13-AV0-68378271
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http://linked.open...avai/riv/aktivita
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http://linked.open...avai/riv/aktivity
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http://linked.open...vai/riv/dodaniDat
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http://linked.open...aciTvurceVysledku
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http://linked.open.../riv/druhVysledku
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http://linked.open...iv/duvernostUdaju
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http://linked.open...titaPredkladatele
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http://linked.open...dnocenehoVysledku
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http://linked.open...ai/riv/idVysledku
| - RIV/68378271:_____/12:00391185
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http://linked.open...riv/jazykVysledku
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http://linked.open.../riv/klicovaSlova
| - PZT; thin film; polymer substrate; XPS; RBS (en)
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http://linked.open.../riv/klicoveSlovo
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http://linked.open...ontrolniKodProRIV
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http://linked.open...v/mistoKonaniAkce
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http://linked.open...i/riv/mistoVydani
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http://linked.open...i/riv/nazevZdroje
| - 2012 International Symposium on Applications of Ferroelectrics held jointly with 11th IEEE ECAPD and IEEE PFM (ISAF/ECAPD/PFM)
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http://linked.open...in/vavai/riv/obor
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http://linked.open...ichTvurcuVysledku
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http://linked.open...cetTvurcuVysledku
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http://linked.open...UplatneniVysledku
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http://linked.open...iv/tvurceVysledku
| - Dejneka, Alexandr
- Jastrabík, Lubomír
- Adolphi, B.
- Gerlach, G.
- Hubička, Zdeněk
- Suchaneck, G.
- Čada, Martin
- Kleiner, A.
- Lavrentiev, V.
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http://linked.open...vavai/riv/typAkce
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http://linked.open...ain/vavai/riv/wos
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http://linked.open.../riv/zahajeniAkce
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http://linked.open...n/vavai/riv/zamer
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number of pages
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http://purl.org/ne...btex#hasPublisher
| - IEEE - Institute of Electrical and Electronics Engineers
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https://schema.org/isbn
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