About: Linear antenna microwave plasma CVD diamond deposition at the edge of no-growth region of C-H-O ternary diagram

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About: Linear antenna microwave plasma CVD diamond deposition at the edge of no-growth region of C-H-O ternary diagram Goto Sponge NotDistinct Permalink

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	The process parametric window for diamond deposition using the chemical vapor deposition at low pressures is quite limited where addition of oxygen in the gas phase broadens this window. The lower boundary of the lens-shaped domain in C-H-O ternary diagram concurs with the H2-CO tie-line (C/(C+O)=0.5). In this work, we present the set of experiments where the ratio of C/(C+O) was kept at a constant value 0.385. The effect of hydrogen concentration (ratio O/(O+H) varied from 0.047 to 0.364) on plasma characteristics and deposited NCD films were investigated. Raman spectroscopy confirmed the diamond character of all deposited coatings while scanning electron microscopy showed transformation from not closed to continuous film and further decrease of grain size and finally growth of diamond nanowires while decreasing hydrogen concentration in a gas mixture. The process parametric window for diamond deposition using the chemical vapor deposition at low pressures is quite limited where addition of oxygen in the gas phase broadens this window. The lower boundary of the lens-shaped domain in C-H-O ternary diagram concurs with the H2-CO tie-line (C/(C+O)=0.5). In this work, we present the set of experiments where the ratio of C/(C+O) was kept at a constant value 0.385. The effect of hydrogen concentration (ratio O/(O+H) varied from 0.047 to 0.364) on plasma characteristics and deposited NCD films were investigated. Raman spectroscopy confirmed the diamond character of all deposited coatings while scanning electron microscopy showed transformation from not closed to continuous film and further decrease of grain size and finally growth of diamond nanowires while decreasing hydrogen concentration in a gas mixture. (en)
Title	Linear antenna microwave plasma CVD diamond deposition at the edge of no-growth region of C-H-O ternary diagram Linear antenna microwave plasma CVD diamond deposition at the edge of no-growth region of C-H-O ternary diagram (en)
skos:prefLabel	Linear antenna microwave plasma CVD diamond deposition at the edge of no-growth region of C-H-O ternary diagram Linear antenna microwave plasma CVD diamond deposition at the edge of no-growth region of C-H-O ternary diagram (en)
skos:notation	RIV/68378271:_____/12:00389192!RIV13-GA0-68378271
http://linked.open...avai/riv/aktivita	P Z
http://linked.open...avai/riv/aktivity	P(GAP205/12/0908), P(GBP108/12/G108), Z(AV0Z10100521)
http://linked.open...iv/cisloPeriodika	12
http://linked.open...vai/riv/dodaniDat	2013
http://linked.open...aciTvurceVysledku	Kromka, Alexander Potocký, Štěpán Hruška, Karel Babchenko, Oleg
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Fyzikální ústav AV ČR, v. v. i.
http://linked.open...dnocenehoVysledku	147114
http://linked.open...ai/riv/idVysledku	RIV/68378271:_____/12:00389192
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	C-H-O phase diagram; nanocrystalline diamond; plasma enhanced CVD; Raman spectroscopy; SEM (en)
http://linked.open.../riv/klicoveSlovo	SEM Raman spectroscopy C-H-O phase diagram plasma enhanced CVD nanocrystalline diamond
http://linked.open...odStatuVydavatele	DE - Spolková republika Německo
http://linked.open...ontrolniKodProRIV	[903405132D2A]
http://linked.open...i/riv/nazevZdroje	Physica Status Solidi B-Basic Solid State Physics
http://linked.open...in/vavai/riv/obor	BM
http://linked.open...ichTvurcuVysledku	4 (xsd:int)
http://linked.open...cetTvurcuVysledku	4 (xsd:int)
http://linked.open...vavai/riv/projekt	Preparation, modification and characterization of materials by radiation Advanced experimental research of large area microwave plasma system for deposition of nanocrystalline diamond films
http://linked.open...UplatneniVysledku	2012
http://linked.open...v/svazekPeriodika	249
http://linked.open...iv/tvurceVysledku	Babchenko, Oleg Hruška, Karel Kromka, Alexander Potocký, Štěpán
http://linked.open...ain/vavai/riv/wos	000312215300074
http://linked.open...n/vavai/riv/zamer	Physics and technology of nanostructures, surfaces and thin films
issn	0370-1972
number of pages	4 (xsd:int)
http://bibframe.org/vocab/doi	10.1002/pssb.201200124

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