About: Review of nanocrystalline diamond film deposition on silicon and glass substrates down to 400 °C

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About: Review of nanocrystalline diamond film deposition on silicon and glass substrates down to 400 °C Goto Sponge NotDistinct Permalink

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	We present an overview of a nanocrystalline diamond (NCD) films deposition on silicon and glass substrates by microwave plasma CVD in hydrogen-based gas mixture. The temperature plays a crucial parameter as the diamond growth process is temperature controlled. Use of temperature sensitive substrates demanded reducing substrate temperature. Natural decrease of deposition rate resulted in search of new or nonstandard process parameters which could at least minimize or compensate it. Addition of oxygen containing gasses was found to improve film quality, and increasing deposition speed. Moreover improvement in pre-treatment of foreign substrates allowed deposition of fully closed films in less then 100 nm. Low thickness of NCD always favorable due to lattice mismatch between substrate material and NCD film. Successful adoption of NCD film deposition on silicon and glass allowed us to study surface chemical modification for protein attachment and DNA immobilization. We present an overview of a nanocrystalline diamond (NCD) films deposition on silicon and glass substrates by microwave plasma CVD in hydrogen-based gas mixture. The temperature plays a crucial parameter as the diamond growth process is temperature controlled. Use of temperature sensitive substrates demanded reducing substrate temperature. Natural decrease of deposition rate resulted in search of new or nonstandard process parameters which could at least minimize or compensate it. Addition of oxygen containing gasses was found to improve film quality, and increasing deposition speed. Moreover improvement in pre-treatment of foreign substrates allowed deposition of fully closed films in less then 100 nm. Low thickness of NCD always favorable due to lattice mismatch between substrate material and NCD film. Successful adoption of NCD film deposition on silicon and glass allowed us to study surface chemical modification for protein attachment and DNA immobilization. (en)
Title	Review of nanocrystalline diamond film deposition on silicon and glass substrates down to 400 °C Review of nanocrystalline diamond film deposition on silicon and glass substrates down to 400 °C (en)
skos:prefLabel	Review of nanocrystalline diamond film deposition on silicon and glass substrates down to 400 °C Review of nanocrystalline diamond film deposition on silicon and glass substrates down to 400 °C (en)
skos:notation	RIV/68378271:_____/12:00388919!RIV13-GA0-68378271
http://linked.open...avai/riv/aktivita	P Z
http://linked.open...avai/riv/aktivity	P(GAP108/12/0891), P(GAP205/12/0908), Z(AV0Z10100521)
http://linked.open...vai/riv/dodaniDat	2013
http://linked.open...aciTvurceVysledku	Kromka, Alexander Rezek, Bohuslav Potocký, Štěpán Varga, Marián Babchenko, Oleg Ižák, Tibor
http://linked.open.../riv/druhVysledku	D - Článek ve sborníku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Fyzikální ústav AV ČR, v. v. i.
http://linked.open...dnocenehoVysledku	165408
http://linked.open...ai/riv/idVysledku	RIV/68378271:_____/12:00388919
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	nanocrystalline diamond; NCD; surface chemical modification (en)
http://linked.open.../riv/klicoveSlovo	NCD nanocrystalline diamond surface chemical modification
http://linked.open...ontrolniKodProRIV	[C8146F3D7D46]
http://linked.open...v/mistoKonaniAkce	Brno
http://linked.open...i/riv/mistoVydani	Brno
http://linked.open...i/riv/nazevZdroje	Potential and applications of surface nanotreatment of polymers and glass 2012 - Book of extended abstracts
http://linked.open...in/vavai/riv/obor	BM
http://linked.open...ichTvurcuVysledku	6 (xsd:int)
http://linked.open...cetTvurcuVysledku	7 (xsd:int)
http://linked.open...vavai/riv/projekt	Advanced experimental research of large area microwave plasma system for deposition of nanocrystalline diamond films Nucleation of diamond on strongly curved surfaces of PLGA-based nanofibers
http://linked.open...UplatneniVysledku	2012
http://linked.open...iv/tvurceVysledku	Babchenko, Oleg Kromka, Alexander Rezek, Bohuslav Ižák, Tibor Potocký, Štěpán Varga, Marián Michalka, M.
http://linked.open...vavai/riv/typAkce	WRD - Světová
http://linked.open.../riv/zahajeniAkce	2012-10-15 (xsd:date)
http://linked.open...n/vavai/riv/zamer	Physics and technology of nanostructures, surfaces and thin films
number of pages	5 (xsd:int)
http://purl.org/ne...btex#hasPublisher	Masarykova univerzita
https://schema.org/isbn	978-80-210-5979-5

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