About: Linear antenna microwave plasma CVD deposition of diamond films over large areas

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About: Linear antenna microwave plasma CVD deposition of diamond films over large areas Goto Sponge NotDistinct Permalink

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	Diamond thin films were grown by linear antenna microwave plasma CVD process over large areas (up to 20 10 cm2) from a hydrogen based gas mixture. The influence of the gas coDmposition (H2, CH4, CO2) and total gas pressure (0.1 and 2 mbar) on the film growth is presented. For CH4/H2 gas mixtures, the surface crystal size does not show dependence on the methane concentration and total pressure and remains below 50 nm as observed by SEM. Adding CO2 (up to 10%) significantly improves the growth rate. However, still no significant change of morphology is observed on films grown at 2 mbar. The crucial improvement of the diamond film purity (as detected by Raman spectroscopy) and crystal size is found for deposition at 0.1 mbar. In this case, crystals are as large as 500 nm and the growth rate increases up to 38 nm/h. Diamond thin films were grown by linear antenna microwave plasma CVD process over large areas (up to 20 10 cm2) from a hydrogen based gas mixture. The influence of the gas coDmposition (H2, CH4, CO2) and total gas pressure (0.1 and 2 mbar) on the film growth is presented. For CH4/H2 gas mixtures, the surface crystal size does not show dependence on the methane concentration and total pressure and remains below 50 nm as observed by SEM. Adding CO2 (up to 10%) significantly improves the growth rate. However, still no significant change of morphology is observed on films grown at 2 mbar. The crucial improvement of the diamond film purity (as detected by Raman spectroscopy) and crystal size is found for deposition at 0.1 mbar. In this case, crystals are as large as 500 nm and the growth rate increases up to 38 nm/h. (en)
Title	Linear antenna microwave plasma CVD deposition of diamond films over large areas Linear antenna microwave plasma CVD deposition of diamond films over large areas (en)
skos:prefLabel	Linear antenna microwave plasma CVD deposition of diamond films over large areas Linear antenna microwave plasma CVD deposition of diamond films over large areas (en)
skos:notation	RIV/68378271:_____/12:00377789!RIV13-GA0-68378271
http://linked.open...avai/riv/aktivita	P Z
http://linked.open...avai/riv/aktivity	P(GAP108/11/0794), P(IAAX00100902), P(KAN400100701), P(LC510), Z(AV0Z10100521)
http://linked.open...iv/cisloPeriodika	6
http://linked.open...vai/riv/dodaniDat	2013
http://linked.open...aciTvurceVysledku	Kromka, Alexander Rezek, Bohuslav Hruška, Karel Babchenko, Oleg Ižák, Tibor
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Fyzikální ústav AV ČR, v. v. i.
http://linked.open...dnocenehoVysledku	147113
http://linked.open...ai/riv/idVysledku	RIV/68378271:_____/12:00377789
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	diamond; large area deposition; linear antenna microwave plasma (en)
http://linked.open.../riv/klicoveSlovo	diamond large area deposition linear antenna microwave plasma
http://linked.open...odStatuVydavatele	GB - Spojené království Velké Británie a Severního Irska
http://linked.open...ontrolniKodProRIV	[BD177E651727]
http://linked.open...i/riv/nazevZdroje	Vacuum
http://linked.open...in/vavai/riv/obor	BM
http://linked.open...ichTvurcuVysledku	5 (xsd:int)
http://linked.open...cetTvurcuVysledku	5 (xsd:int)
http://linked.open...vavai/riv/projekt	Center of nanotechnology and materials for nanoelectronics Functional hybrid nanosystems of semiconductors and metals with organic materials (FUNS) Visualization of collagen production in osteogenic cells cultivated on nanocrystalline diamond films Electronically and chemically optimized nanocrystalline diamond structures for bio-applications
http://linked.open...UplatneniVysledku	2012
http://linked.open...v/svazekPeriodika	86
http://linked.open...iv/tvurceVysledku	Babchenko, Oleg Hruška, Karel Kromka, Alexander Rezek, Bohuslav Ižák, Tibor
http://linked.open...ain/vavai/riv/wos	000301018400048
http://linked.open...n/vavai/riv/zamer	Physics and technology of nanostructures, surfaces and thin films
issn	0042-207X
number of pages	4 (xsd:int)
http://bibframe.org/vocab/doi	10.1016/j.vacuum.2011.07.008

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