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Description
  • Well-defined diamond channels (in widths from 5 µm down to 250 nm) were realized by selected area deposition applying optical and electron beam lithography for polymer structuring. The realized diamond channels were electrically active (reveal surface conductivity).
  • Well-defined diamond channels (in widths from 5 µm down to 250 nm) were realized by selected area deposition applying optical and electron beam lithography for polymer structuring. The realized diamond channels were electrically active (reveal surface conductivity). (en)
Title
  • Direct growth of sub-micron diamond structures
  • Direct growth of sub-micron diamond structures (en)
skos:prefLabel
  • Direct growth of sub-micron diamond structures
  • Direct growth of sub-micron diamond structures (en)
skos:notation
  • RIV/68378271:_____/12:00377642!RIV13-AV0-68378271
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • P(IAAX00100902), P(KAN400100701), Z(AV0Z10100521)
http://linked.open...iv/cisloPeriodika
  • 6
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
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http://linked.open...dnocenehoVysledku
  • 131420
http://linked.open...ai/riv/idVysledku
  • RIV/68378271:_____/12:00377642
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • diamond structuring; electron beam lithography; selected-area deposition (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...odStatuVydavatele
  • GB - Spojené království Velké Británie a Severního Irska
http://linked.open...ontrolniKodProRIV
  • [67D57EA4A279]
http://linked.open...i/riv/nazevZdroje
  • Vacuum
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http://linked.open...v/svazekPeriodika
  • 86
http://linked.open...iv/tvurceVysledku
  • Babchenko, Oleg
  • Hruška, Karel
  • Kromka, Alexander
  • Rezek, Bohuslav
  • Ledinský, Martin
  • Verveniotis, Elisseos
http://linked.open...ain/vavai/riv/wos
  • 000301018400026
http://linked.open...n/vavai/riv/zamer
issn
  • 0042-207X
number of pages
http://bibframe.org/vocab/doi
  • 10.1016/j.vacuum.2011.08.011
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