About: In-situ monitoring of the influence of inert gases (Ne, Ar, Kr, Xe) on plasma properties and the growth of magnetron sputtered nanostructured silver thin film

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About: In-situ monitoring of the influence of inert gases (Ne, Ar, Kr, Xe) on plasma properties and the growth of magnetron sputtered nanostructured silver thin film Goto Sponge NotDistinct Permalink

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	Ultrathin nanostructured silver films exhibit unusual properties and performances. Functional properties of the film depend strongly on the nanostructure that can be manipulated by varying nucleation and growth conditions, which are in the case of RF magnetron sputtering closely related to plasma parameters. The sputtering process and the film growth are significantly influenced by the mass ratio of deposited atoms and sputtering gas ions. Deposition conditions promoting the growth of nanostructured film can be established via varying plasma parameters, i.e. mass, energy and flux of atoms and ions impinging the substrate and the ratio of atoms and ions. Ultrathin nanostructured silver films exhibit unusual properties and performances. Functional properties of the film depend strongly on the nanostructure that can be manipulated by varying nucleation and growth conditions, which are in the case of RF magnetron sputtering closely related to plasma parameters. The sputtering process and the film growth are significantly influenced by the mass ratio of deposited atoms and sputtering gas ions. Deposition conditions promoting the growth of nanostructured film can be established via varying plasma parameters, i.e. mass, energy and flux of atoms and ions impinging the substrate and the ratio of atoms and ions. (en)
Title	In-situ monitoring of the influence of inert gases (Ne, Ar, Kr, Xe) on plasma properties and the growth of magnetron sputtered nanostructured silver thin film In-situ monitoring of the influence of inert gases (Ne, Ar, Kr, Xe) on plasma properties and the growth of magnetron sputtered nanostructured silver thin film (en)
skos:prefLabel	In-situ monitoring of the influence of inert gases (Ne, Ar, Kr, Xe) on plasma properties and the growth of magnetron sputtered nanostructured silver thin film In-situ monitoring of the influence of inert gases (Ne, Ar, Kr, Xe) on plasma properties and the growth of magnetron sputtered nanostructured silver thin film (en)
skos:notation	RIV/68378271:_____/11:00390588!RIV13-GA0-68378271
http://linked.open...avai/riv/aktivita	P Z
http://linked.open...avai/riv/aktivity	P(GAP108/11/0958), P(GAP108/11/1298), P(GP202/09/P324), P(MEB091125), Z(AV0Z10100522)
http://linked.open...vai/riv/dodaniDat	2013
http://linked.open...aciTvurceVysledku	Lančok, Ján Musil, Jindřich Novotný, Michal Fekete, Ladislav Bulíř, Jiří
http://linked.open.../riv/druhVysledku	O - Ostatní výsledky nezařaditelné do žádného z výše uvedených druhů výsledku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Fyzikální ústav AV ČR, v. v. i.
http://linked.open...dnocenehoVysledku	205032
http://linked.open...ai/riv/idVysledku	RIV/68378271:_____/11:00390588
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	silver; magnetron sputtering; in-situ monitoring; plasma characterization (en)
http://linked.open.../riv/klicoveSlovo	magnetron sputtering in-situ monitoring plasma characterization silver
http://linked.open...ontrolniKodProRIV	[AC4CA5D5C687]
http://linked.open...in/vavai/riv/obor	BM
http://linked.open...ichTvurcuVysledku	5 (xsd:int)
http://linked.open...cetTvurcuVysledku	8 (xsd:int)
http://linked.open...vavai/riv/projekt	Investigation of point defects in ZnO and their interaction with hydrogen and nitrogen Advanced system for monitoring of the growth of metal nanostructures on dielectric substrate Deposition and characterization of nanostructured hard coatings with tailored optical properties Detection layers based on composites of organocomplexes and nanoparticles for chemical sensors
http://linked.open...UplatneniVysledku	2011
http://linked.open...iv/tvurceVysledku	Lančok, Ján Musil, Jindřich Novotný, Michal Pokorný, P. Piksová, K. Bulíř, Jiří Fekete, Ladislav Čekada, M.
http://linked.open...n/vavai/riv/zamer	Wave and Corpuscular Light Propagation, Optical Materials and Technology

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