About: From micro- to nanocrystalline diamond films

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An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	In this study we compare different methods to deposit nanocrystalline diamond (NCD) films with low surface roughness required for various applications. Bias enhanced re-nucleation, argon and CO2 addition, CH4/H2 ratio variation and the influence of the pressure are mentioned. For diamond films deposition three different systems were used: (i) double bias enhanced hot filament chemical vapour deposition (HFCVD), (ii) focused microwave plasma (FMWP) and (iii) pulsed linear antenna microwave plasma (PLAMWP) system. The grain size and surface morphology of samples were evaluated from SEM (Scanning Electron Microscopy) images. The processes, which take place during the diamond deposition, are discussed in the article. In this study we compare different methods to deposit nanocrystalline diamond (NCD) films with low surface roughness required for various applications. Bias enhanced re-nucleation, argon and CO2 addition, CH4/H2 ratio variation and the influence of the pressure are mentioned. For diamond films deposition three different systems were used: (i) double bias enhanced hot filament chemical vapour deposition (HFCVD), (ii) focused microwave plasma (FMWP) and (iii) pulsed linear antenna microwave plasma (PLAMWP) system. The grain size and surface morphology of samples were evaluated from SEM (Scanning Electron Microscopy) images. The processes, which take place during the diamond deposition, are discussed in the article. (en)
Title	From micro- to nanocrystalline diamond films From micro- to nanocrystalline diamond films (en)
skos:prefLabel	From micro- to nanocrystalline diamond films From micro- to nanocrystalline diamond films (en)
skos:notation	RIV/68378271:_____/11:00390465!RIV13-AV0-68378271
http://linked.open...avai/riv/aktivita	P Z
http://linked.open...avai/riv/aktivity	P(IAAX00100902), P(KAN400100701), P(MEB0810081), P(MEB0810082), Z(AV0Z10100521)
http://linked.open...vai/riv/dodaniDat	2013
http://linked.open...aciTvurceVysledku	Kromka, Alexander Potocký, Štěpán Babchenko, Oleg Ižák, Tibor
http://linked.open.../riv/druhVysledku	D - Článek ve sborníku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Fyzikální ústav AV ČR, v. v. i.
http://linked.open...dnocenehoVysledku	200437
http://linked.open...ai/riv/idVysledku	RIV/68378271:_____/11:00390465
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	nanocrystalline; microcrystalline diamond; MWCVD; Raman; SEM (en)
http://linked.open.../riv/klicoveSlovo	SEM MWCVD Raman microcrystalline diamond nanocrystalline
http://linked.open...ontrolniKodProRIV	[92280270EC2A]
http://linked.open...v/mistoKonaniAkce	Štrbské Pleso
http://linked.open...i/riv/mistoVydani	Bratislava
http://linked.open...i/riv/nazevZdroje	Proceeding of School of Vacuum Technology - Vacuum and Advanced Materials
http://linked.open...in/vavai/riv/obor	BM
http://linked.open...ichTvurcuVysledku	4 (xsd:int)
http://linked.open...cetTvurcuVysledku	6 (xsd:int)
http://linked.open...vavai/riv/projekt	Study of electrical and optical properties of nanodiamond and diamond-like thin films Directed manipulation of surfaces of diamond nanostructures and their characterization Functional hybrid nanosystems of semiconductors and metals with organic materials (FUNS) Electronically and chemically optimized nanocrystalline diamond structures for bio-applications
http://linked.open...UplatneniVysledku	2011
http://linked.open...iv/tvurceVysledku	Babchenko, Oleg Kromka, Alexander Ižák, Tibor Marton, M. Potocký, Štěpán Veselý, M.
http://linked.open...vavai/riv/typAkce	EUR - Evropská
http://linked.open.../riv/zahajeniAkce	2011-09-08 (xsd:date)
http://linked.open...n/vavai/riv/zamer	Physics and technology of nanostructures, surfaces and thin films
number of pages	6 (xsd:int)
http://purl.org/ne...btex#hasPublisher	Slovenská vákuová spoločnosť
https://schema.org/isbn	978-80-969435-9-3

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