About: Microscopic measurements of polycrystalline silicon thin films on glass

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	Microscopic study of charge transport collection in silicon thin films can be studied with resolution down to 10 nm, which allows study of individual crystalline grains in microcrystalline silicon or individual crystallites separated by grain boundaries within the polycrystalline silicon grains on glass. We have developed two complementary approaches: conductive atomic force microscopy (C-AFM) and measurements with two probes navigated by a scanning electron microscope. We have also proposed and tested a novel procedure for measurements of the same spot after repeated mounting. The procedure uses simple nanoindentation marks which can be easily localized with high precision in various microscopes used (optical, scanning electron microscope, CAFM). This enables measurements of the same spot on a sample before and after technological steps (e.g. hydrogenation or deposition) and thus an investigation of microscopic effects of these treatments. Microscopic study of charge transport collection in silicon thin films can be studied with resolution down to 10 nm, which allows study of individual crystalline grains in microcrystalline silicon or individual crystallites separated by grain boundaries within the polycrystalline silicon grains on glass. We have developed two complementary approaches: conductive atomic force microscopy (C-AFM) and measurements with two probes navigated by a scanning electron microscope. We have also proposed and tested a novel procedure for measurements of the same spot after repeated mounting. The procedure uses simple nanoindentation marks which can be easily localized with high precision in various microscopes used (optical, scanning electron microscope, CAFM). This enables measurements of the same spot on a sample before and after technological steps (e.g. hydrogenation or deposition) and thus an investigation of microscopic effects of these treatments. (en)
Title	Microscopic measurements of polycrystalline silicon thin films on glass Microscopic measurements of polycrystalline silicon thin films on glass (en)
skos:prefLabel	Microscopic measurements of polycrystalline silicon thin films on glass Microscopic measurements of polycrystalline silicon thin films on glass (en)
skos:notation	RIV/68378271:_____/11:00375317!RIV12-AV0-68378271
http://linked.open...avai/riv/aktivita	P Z
http://linked.open...avai/riv/aktivity	P(IAA100100902), P(KAN400100701), P(LC06040), P(LC510), Z(AV0Z10100521)
http://linked.open...vai/riv/dodaniDat	2012
http://linked.open...aciTvurceVysledku	Fejfar, Antonín Ledinský, Martin Vetushka, Aliaksi Kočka, Jan
http://linked.open.../riv/druhVysledku	D - Článek ve sborníku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Fyzikální ústav AV ČR, v. v. i.
http://linked.open...dnocenehoVysledku	212351
http://linked.open...ai/riv/idVysledku	RIV/68378271:_____/11:00375317
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	Si-films; polycrystalline Si; microcrystalline Si (en)
http://linked.open.../riv/klicoveSlovo	Si-films microcrystalline Si polycrystalline Si
http://linked.open...ontrolniKodProRIV	[680FE29D1C3E]
http://linked.open...v/mistoKonaniAkce	Hamburg
http://linked.open...i/riv/mistoVydani	München
http://linked.open...i/riv/nazevZdroje	Proceedings of the 26th European Photovoltaic Solar Energy Conference and Exhibition
http://linked.open...in/vavai/riv/obor	BM
http://linked.open...ichTvurcuVysledku	4 (xsd:int)
http://linked.open...cetTvurcuVysledku	4 (xsd:int)
http://linked.open...vavai/riv/projekt	Center of nanotechnology and materials for nanoelectronics Functional hybrid nanosystems of semiconductors and metals with organic materials (FUNS) Structures for Nanophotonics and Nanoelectronics Study of ultrafast photoconductivity and charge transport in thin semiconducting layers using terahertz spectroscopy
http://linked.open...UplatneniVysledku	2011
http://linked.open...iv/tvurceVysledku	Ledinský, Martin Fejfar, Antonín Kočka, Jan Vetushka, Aliaksi
http://linked.open...vavai/riv/typAkce	WRD - Světová
http://linked.open.../riv/zahajeniAkce	2011-09-05 (xsd:date)
http://linked.open...n/vavai/riv/zamer	Physics and technology of nanostructures, surfaces and thin films
number of pages	3 (xsd:int)
http://bibframe.org/vocab/doi	10.4229/26thEUPVSEC2011-3AV.3.14
http://purl.org/ne...btex#hasPublisher	WIP München
https://schema.org/isbn	3-936338-27-2

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