About: Pulsed linear antenna microwave plasma – a step ahead in large area material depositions and surface functionalization     Goto   Sponge   NotDistinct   Permalink

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Description
  • A technological progress in the large area growth of diamond films and carbon nanotubes by the modified linear antenna MW system is presented. We show a correlation between process parameters and nano- or poly-crystalline film character. A challenging part, diamond coated mirrors or ATR prisms, are shown as multifunctional optical elements suitable for detection of absorbed molecules. Additional positive feature of the presented plasma system is low temperature hydrogen functionalization of diamond films. Finally, we present that combination of pulsed MW plasma with radiofrequency substrate biasing results in growth of oriented CNTs over large area.
  • A technological progress in the large area growth of diamond films and carbon nanotubes by the modified linear antenna MW system is presented. We show a correlation between process parameters and nano- or poly-crystalline film character. A challenging part, diamond coated mirrors or ATR prisms, are shown as multifunctional optical elements suitable for detection of absorbed molecules. Additional positive feature of the presented plasma system is low temperature hydrogen functionalization of diamond films. Finally, we present that combination of pulsed MW plasma with radiofrequency substrate biasing results in growth of oriented CNTs over large area. (en)
Title
  • Pulsed linear antenna microwave plasma – a step ahead in large area material depositions and surface functionalization
  • Pulsed linear antenna microwave plasma – a step ahead in large area material depositions and surface functionalization (en)
skos:prefLabel
  • Pulsed linear antenna microwave plasma – a step ahead in large area material depositions and surface functionalization
  • Pulsed linear antenna microwave plasma – a step ahead in large area material depositions and surface functionalization (en)
skos:notation
  • RIV/68378271:_____/11:00374830!RIV12-AV0-68378271
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • P(GAP108/11/0794), P(IAAX00100902), P(KAN400100701), P(MEB0810082), Z(AV0Z10100521)
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 225263
http://linked.open...ai/riv/idVysledku
  • RIV/68378271:_____/11:00374830
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • microwave plasma; CVD deposition; diamond; CNT; graphene (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...ontrolniKodProRIV
  • [861779F08B00]
http://linked.open...v/mistoKonaniAkce
  • Brno
http://linked.open...i/riv/mistoVydani
  • Ostrava
http://linked.open...i/riv/nazevZdroje
  • NANOCON 2011. Conference proceedings
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...vavai/riv/projekt
http://linked.open...UplatneniVysledku
http://linked.open...iv/tvurceVysledku
  • Babchenko, Oleg
  • Hruška, Karel
  • Kromka, Alexander
  • Rezek, Bohuslav
  • Ižák, Tibor
  • Remeš, Zdeněk
  • Kozak, Halina
  • Potocký, Štěpán
  • Neykova, Neda
  • Davydova, Marina
http://linked.open...vavai/riv/typAkce
http://linked.open.../riv/zahajeniAkce
http://linked.open...n/vavai/riv/zamer
number of pages
http://purl.org/ne...btex#hasPublisher
  • Tanger Ltd
https://schema.org/isbn
  • 978-80-87294-27-7
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