About: Time-resolved plasma parameters in the HiPIMS discharge with Ti target in Ar/O2 atmosphere

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About: Time-resolved plasma parameters in the HiPIMS discharge with Ti target in Ar/O2 atmosphere Goto Sponge NotDistinct Permalink

An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	A High Power Impulse Magnetron Sputtering System(HiPIMS) equipped with a titanium target 5 cm in diameter has been investigated by means of a time-resolved Langmuir probe and time-resolved ion flux probe. The plasma parameters have been measured in a distance of 70 mm from the target face and below the racetrack. The ion flux at the substrate (placed at the same position as the Langmuir probe) has been determined from the voltage drop across a resistor connected with the planar probe. The planar probe was pulsed at a repetition rate of 50 kHz, duty cycle 50%. The effects of working gas pressure and mean discharge current have been investigated. A High Power Impulse Magnetron Sputtering System(HiPIMS) equipped with a titanium target 5 cm in diameter has been investigated by means of a time-resolved Langmuir probe and time-resolved ion flux probe. The plasma parameters have been measured in a distance of 70 mm from the target face and below the racetrack. The ion flux at the substrate (placed at the same position as the Langmuir probe) has been determined from the voltage drop across a resistor connected with the planar probe. The planar probe was pulsed at a repetition rate of 50 kHz, duty cycle 50%. The effects of working gas pressure and mean discharge current have been investigated. (en)
Title	Time-resolved plasma parameters in the HiPIMS discharge with Ti target in Ar/O2 atmosphere Time-resolved plasma parameters in the HiPIMS discharge with Ti target in Ar/O2 atmosphere (en)
skos:prefLabel	Time-resolved plasma parameters in the HiPIMS discharge with Ti target in Ar/O2 atmosphere Time-resolved plasma parameters in the HiPIMS discharge with Ti target in Ar/O2 atmosphere (en)
skos:notation	RIV/68378271:_____/11:00364640!RIV12-AV0-68378271
http://linked.open...avai/riv/aktivita	P Z
http://linked.open...avai/riv/aktivity	P(1M06002), P(GA202/09/0800), P(GP202/09/P159), P(KAN400720701), P(KJB100100805), Z(AV0Z10100522)
http://linked.open...iv/cisloPeriodika	2
http://linked.open...vai/riv/dodaniDat	2012
http://linked.open...aciTvurceVysledku	Čada, Martin Hubička, Zdeněk Adámek, Petr Jastrabík, Lubomír Klusoň, Jan
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Fyzikální ústav AV ČR, v. v. i.
http://linked.open...dnocenehoVysledku	235389
http://linked.open...ai/riv/idVysledku	RIV/68378271:_____/11:00364640
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	HiPIMS; Langmuir probe; ion flux; reactive sputtering (en)
http://linked.open.../riv/klicoveSlovo	reactive sputtering Langmuir probe ion flux HiPIMS
http://linked.open...odStatuVydavatele	CH - Švýcarská konfederace
http://linked.open...ontrolniKodProRIV	[DE575CCA8255]
http://linked.open...i/riv/nazevZdroje	Surface and Coatings Technology
http://linked.open...in/vavai/riv/obor	BH
http://linked.open...ichTvurcuVysledku	5 (xsd:int)
http://linked.open...cetTvurcuVysledku	5 (xsd:int)
http://linked.open...vavai/riv/projekt	Optical structures, detection systems and relevant technologies for low photon number applications Hierarchic nanosystems for microelektronics A diagnostics of pulsed plasma generated in systems with plasma jets used for technological applications of thin film deposition. Pulse mode and microwave plasma sources - research and applications An investigation of low-temperature plasma in systems of a planar magnetron, in systems with hollow cathodes and a microwave surfatron
http://linked.open...UplatneniVysledku	2011
http://linked.open...v/svazekPeriodika	205
http://linked.open...iv/tvurceVysledku	Adámek, Petr Jastrabík, Lubomír Hubička, Zdeněk Čada, Martin Klusoň, Jan
http://linked.open...ain/vavai/riv/wos	000293258600068
http://linked.open...n/vavai/riv/zamer	Wave and Corpuscular Light Propagation, Optical Materials and Technology
issn	0257-8972
number of pages	4 (xsd:int)
http://bibframe.org/vocab/doi	10.1016/j.surfcoat.2010.11.050

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