About: Investigation of the negative ions in Ar/O2 plasma of magnetron sputtering discharge with Al:Zn target by ion mass spectrometry

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About: Investigation of the negative ions in Ar/O2 plasma of magnetron sputtering discharge with Al:Zn target by ion mass spectrometry Goto Sponge NotDistinct Permalink

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	The magnetron sputtering discharge used to deposit aluminum-doped zinc oxide was analyzed by energy-resolved ion mass spectrometry. The flux of negative ions was measured at three radial positions in the plane of the substrate holder. The oxygen flow fO2 was varied from 0 to 17 sccm to investigate the discharge in all operation modes, i.e., metallic, transition, and oxide mode of sputtering. The existence of negative ions was determined from the energy spectra.Main attention was devoted to the investigation of O , O 2 , AlO , AlO 2 , ZnO , ZnO 2 , and AlO 3 negative ions and correlations of their intensities in the energy spectrum with discharge parameters (cathode voltage, magnetron power, and gas pressure). It was found that (i) intensities of negative ions exhibit maxima in the vicinity of transition between the metallic and transition mode of sputtering and (ii) in the oxide mode intensities of these ions are saturated. The magnetron sputtering discharge used to deposit aluminum-doped zinc oxide was analyzed by energy-resolved ion mass spectrometry. The flux of negative ions was measured at three radial positions in the plane of the substrate holder. The oxygen flow fO2 was varied from 0 to 17 sccm to investigate the discharge in all operation modes, i.e., metallic, transition, and oxide mode of sputtering. The existence of negative ions was determined from the energy spectra.Main attention was devoted to the investigation of O , O 2 , AlO , AlO 2 , ZnO , ZnO 2 , and AlO 3 negative ions and correlations of their intensities in the energy spectrum with discharge parameters (cathode voltage, magnetron power, and gas pressure). It was found that (i) intensities of negative ions exhibit maxima in the vicinity of transition between the metallic and transition mode of sputtering and (ii) in the oxide mode intensities of these ions are saturated. (en)
Title	Investigation of the negative ions in Ar/O2 plasma of magnetron sputtering discharge with Al:Zn target by ion mass spectrometry Investigation of the negative ions in Ar/O2 plasma of magnetron sputtering discharge with Al:Zn target by ion mass spectrometry (en)
skos:prefLabel	Investigation of the negative ions in Ar/O2 plasma of magnetron sputtering discharge with Al:Zn target by ion mass spectrometry Investigation of the negative ions in Ar/O2 plasma of magnetron sputtering discharge with Al:Zn target by ion mass spectrometry (en)
skos:notation	RIV/68378271:_____/11:00363960!RIV12-AV0-68378271
http://linked.open...avai/riv/aktivita	P Z
http://linked.open...avai/riv/aktivity	P(GP202/09/P324), P(IAA100100718), P(KAN400100653), Z(AV0Z10100522)
http://linked.open...iv/cisloPeriodika	5
http://linked.open...vai/riv/dodaniDat	2012
http://linked.open...aciTvurceVysledku	Lančok, Ján Fitl, Přemysl Musil, Jindřich Mišina, Martin Pokorný, Petr Novotný, Michal Bulíř, Jiří
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Fyzikální ústav AV ČR, v. v. i.
http://linked.open...dnocenehoVysledku	205733
http://linked.open...ai/riv/idVysledku	RIV/68378271:_____/11:00363960
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	energy-resolved ion mass spectrometry; formation of negative ions; magnetron sputtering; mass spectrometry; transparent conductive oxide (en)
http://linked.open.../riv/klicoveSlovo	magnetron sputtering energy-resolved ion mass spectrometry formation of negative ions mass spectrometry transparent conductive oxide
http://linked.open...odStatuVydavatele	DE - Spolková republika Německo
http://linked.open...ontrolniKodProRIV	[AD1836687910]
http://linked.open...i/riv/nazevZdroje	Plasma Processes and Polymers
http://linked.open...in/vavai/riv/obor	BM
http://linked.open...ichTvurcuVysledku	7 (xsd:int)
http://linked.open...cetTvurcuVysledku	7 (xsd:int)
http://linked.open...vavai/riv/projekt	Self-organized magnetic nanostructures Advanced system for monitoring of the growth of metal nanostructures on dielectric substrate Metal-dielectric nanostructures for optics
http://linked.open...UplatneniVysledku	2011
http://linked.open...v/svazekPeriodika	8
http://linked.open...iv/tvurceVysledku	Lančok, Ján Musil, Jindřich Novotný, Michal Pokorný, Petr Fitl, Přemysl Bulíř, Jiří Mišina, Martin
http://linked.open...ain/vavai/riv/wos	000290633300011
http://linked.open...n/vavai/riv/zamer	Wave and Corpuscular Light Propagation, Optical Materials and Technology
issn	1612-8850
number of pages	6 (xsd:int)
http://bibframe.org/vocab/doi	10.1002/ppap.201000195

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