About: In-situ monitoring of the growth of nanostructured aluminum thin film

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	In order to control the nanostructure of aluminum thin films fabricated by RF magnetron sputtering, we made use of in-situ monitoring of electrical and optical properties of the growing layer as well as plasma characterization by mass and optical emission spectroscopy. The electrical conductivity and I-V characteristics were measured. The optical constants were obtained from optical monitoring based on spectral ellipsometry. The relevant models (based on one or two Lorentz oscillators and B-spline functions) were suggested to evaluate the data obtained from themonitoring techniques. The results of the in-situ monitoring were correlated with scanning electron microscope analyses. The nanostructure was effectively manipulated by RF power variation. Optical functions exhibiting plasmonic behavior in the UV range and a strong nonlinear character of I-V curves were obtained for an ultrathin Al film deposited at a lower growth rate. In order to control the nanostructure of aluminum thin films fabricated by RF magnetron sputtering, we made use of in-situ monitoring of electrical and optical properties of the growing layer as well as plasma characterization by mass and optical emission spectroscopy. The electrical conductivity and I-V characteristics were measured. The optical constants were obtained from optical monitoring based on spectral ellipsometry. The relevant models (based on one or two Lorentz oscillators and B-spline functions) were suggested to evaluate the data obtained from themonitoring techniques. The results of the in-situ monitoring were correlated with scanning electron microscope analyses. The nanostructure was effectively manipulated by RF power variation. Optical functions exhibiting plasmonic behavior in the UV range and a strong nonlinear character of I-V curves were obtained for an ultrathin Al film deposited at a lower growth rate. (en)
Title	In-situ monitoring of the growth of nanostructured aluminum thin film In-situ monitoring of the growth of nanostructured aluminum thin film (en)
skos:prefLabel	In-situ monitoring of the growth of nanostructured aluminum thin film In-situ monitoring of the growth of nanostructured aluminum thin film (en)
skos:notation	RIV/68378271:_____/11:00361263!RIV13-GA0-68378271
http://linked.open...avai/riv/aktivita	P Z
http://linked.open...avai/riv/aktivity	P(GP202/09/P324), P(IAA100100718), P(IAA100100729), Z(AV0Z10100522)
http://linked.open...iv/cisloPeriodika	5
http://linked.open...vai/riv/dodaniDat	2013
http://linked.open...aciTvurceVysledku	Lančok, Ján Pokorný, Petr Novotný, Michal Bodnár, Michal Bulíř, Jiří
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Fyzikální ústav AV ČR, v. v. i.
http://linked.open...dnocenehoVysledku	205031
http://linked.open...ai/riv/idVysledku	RIV/68378271:_____/11:00361263
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	aluminum ultrathin film; magnetron sputtering; in-situ monitoring; electrical conductivity; spectral ellipsometry; optical emission spectroscopy (en)
http://linked.open.../riv/klicoveSlovo	magnetron sputtering aluminum ultrathin film in-situ monitoring spectral ellipsometry optical emission spectroscopy electrical conductivity
http://linked.open...odStatuVydavatele	US - Spojené státy americké
http://linked.open...ontrolniKodProRIV	[B3578EDE1B0F]
http://linked.open...i/riv/nazevZdroje	Journal of Nanophotonics
http://linked.open...in/vavai/riv/obor	BM
http://linked.open...ichTvurcuVysledku	5 (xsd:int)
http://linked.open...cetTvurcuVysledku	5 (xsd:int)
http://linked.open...vavai/riv/projekt	Advanced system for monitoring of the growth of metal nanostructures on dielectric substrate Metal-dielectric nanostructures for optics Development of novel hybrid deposition techniques for preparation of nanostructured fluoride thin films exhibiting outstanding fluorescent properties
http://linked.open...UplatneniVysledku	2011
http://linked.open...v/svazekPeriodika	5
http://linked.open...iv/tvurceVysledku	Lančok, Ján Novotný, Michal Pokorný, Petr Bodnár, Michal Bulíř, Jiří
http://linked.open...ain/vavai/riv/wos	000289550100001
http://linked.open...n/vavai/riv/zamer	Wave and Corpuscular Light Propagation, Optical Materials and Technology
issn	1934-2608
number of pages	10 (xsd:int)
http://bibframe.org/vocab/doi	10.1117/1.3543816

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