About: Mechanical and tribological properties of coatings sputtered from SiC target in the presence of CH4 gas

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About: Mechanical and tribological properties of coatings sputtered from SiC target in the presence of CH4 gas Goto Sponge NotDistinct Permalink

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	In the present work the amorphous hydrogenated silicon-carbide (a-SiC:H) films with different C/Si ratio were prepared at room temperature using DC magnetron sputtering in two ways: (i) sputtering of silicon target; (ii) sputtering of SiC target, both in the gas mixture of Ar and CH4. In the latter case the films contained less hydrogen at the same C/Si ratio. The mechanical and tribological properties of these films were studied to find their optimum combination. The hardness, elastic modulus (nanoindentation), intrinsic stress (Stoney's formula) and coefficient of friction (pin on disc tribometer) were examined in dependence on the technological parameters, film structure and composition (Raman spectra, electron probe microanalysis). In the present work the amorphous hydrogenated silicon-carbide (a-SiC:H) films with different C/Si ratio were prepared at room temperature using DC magnetron sputtering in two ways: (i) sputtering of silicon target; (ii) sputtering of SiC target, both in the gas mixture of Ar and CH4. In the latter case the films contained less hydrogen at the same C/Si ratio. The mechanical and tribological properties of these films were studied to find their optimum combination. The hardness, elastic modulus (nanoindentation), intrinsic stress (Stoney's formula) and coefficient of friction (pin on disc tribometer) were examined in dependence on the technological parameters, film structure and composition (Raman spectra, electron probe microanalysis). (en)
Title	Mechanical and tribological properties of coatings sputtered from SiC target in the presence of CH4 gas Mechanical and tribological properties of coatings sputtered from SiC target in the presence of CH4 gas (en)
skos:prefLabel	Mechanical and tribological properties of coatings sputtered from SiC target in the presence of CH4 gas Mechanical and tribological properties of coatings sputtered from SiC target in the presence of CH4 gas (en)
skos:notation	RIV/68378271:_____/11:00359397!RIV12-AV0-68378271
http://linked.open...avai/riv/aktivita	N P Z
http://linked.open...avai/riv/aktivity	N, P(1M06002), P(KAN301370701), Z(AV0Z10100522)
http://linked.open...iv/cisloPeriodika	11
http://linked.open...vai/riv/dodaniDat	2012
http://linked.open...aciTvurceVysledku	Čtvrtlík, Radim Boháč, Petr Vorlíček, Vladimír Kulykovskyy, Valeriy Jastrabík, Lubomír
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Fyzikální ústav AV ČR, v. v. i.
http://linked.open...dnocenehoVysledku	211219
http://linked.open...ai/riv/idVysledku	RIV/68378271:_____/11:00359397
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	amorphous SiC films; sputtering; hardness; coefficient of friction; Raman spectra (en)
http://linked.open.../riv/klicoveSlovo	sputtering Raman spectra hardness coefficient of friction amorphous SiC films
http://linked.open...odStatuVydavatele	CH - Švýcarská konfederace
http://linked.open...ontrolniKodProRIV	[08B07F7EA0BA]
http://linked.open...i/riv/nazevZdroje	Surface and Coatings Technology
http://linked.open...in/vavai/riv/obor	BM
http://linked.open...ichTvurcuVysledku	5 (xsd:int)
http://linked.open...cetTvurcuVysledku	7 (xsd:int)
http://linked.open...vavai/riv/projekt	Optical structures, detection systems and relevant technologies for low photon number applications Nanostructured Macroscopic Systems - Technology and Characterisation
http://linked.open...UplatneniVysledku	2011
http://linked.open...v/svazekPeriodika	205
http://linked.open...iv/tvurceVysledku	Jastrabík, Lubomír Boháč, Petr Kulykovskyy, Valeriy Vorlíček, Vladimír Čtvrtlík, Radim Bláhová, O. Suchánek, J.
http://linked.open...ain/vavai/riv/wos	000287906900005
http://linked.open...n/vavai/riv/zamer	Wave and Corpuscular Light Propagation, Optical Materials and Technology
issn	0257-8972
number of pages	6 (xsd:int)
http://bibframe.org/vocab/doi	10.1016/j.surfcoat.2010.11.057

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