About: Damage mechanisms of MoN/SiN multilayer optics for next-generation pulsed XUV light sources

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About: Damage mechanisms of MoN/SiN multilayer optics for next-generation pulsed XUV light sources Goto Sponge NotDistinct Permalink

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	We investigated the damage mechanism of MoN/SiN multilayer XUV optics under two extreme conditions: thermal annealing and irradiation with single shot intense XUV pulses from the free-electron laser facility in Hamburg - FLASH. The damage was studied %22post-mortem%22 by means of X-ray diffraction, interference-polarizing optical microscopy, atomic force microscopy, and scanning transmission electron microscopy. Although the timescale of the damage processes and the damage threshold temperatures were different (in the case of annealing it was the dissociation temperature of Mo2N and in the case of XUV irradiation it was the melting temperature of MoN) the main damage mechanism is very similar: molecular dissociation and the formation of N-2, leading to bubbles inside the multilayer structure. We investigated the damage mechanism of MoN/SiN multilayer XUV optics under two extreme conditions: thermal annealing and irradiation with single shot intense XUV pulses from the free-electron laser facility in Hamburg - FLASH. The damage was studied %22post-mortem%22 by means of X-ray diffraction, interference-polarizing optical microscopy, atomic force microscopy, and scanning transmission electron microscopy. Although the timescale of the damage processes and the damage threshold temperatures were different (in the case of annealing it was the dissociation temperature of Mo2N and in the case of XUV irradiation it was the melting temperature of MoN) the main damage mechanism is very similar: molecular dissociation and the formation of N-2, leading to bubbles inside the multilayer structure. (en)
Title	Damage mechanisms of MoN/SiN multilayer optics for next-generation pulsed XUV light sources Damage mechanisms of MoN/SiN multilayer optics for next-generation pulsed XUV light sources (en)
skos:prefLabel	Damage mechanisms of MoN/SiN multilayer optics for next-generation pulsed XUV light sources Damage mechanisms of MoN/SiN multilayer optics for next-generation pulsed XUV light sources (en)
skos:notation	RIV/68378271:_____/11:00359322!RIV12-AV0-68378271
http://linked.open...avai/riv/aktivita	P Z
http://linked.open...avai/riv/aktivity	P(IAA400100701), P(KAN300100801), P(LA08024), P(LC510), P(LC528), Z(AV0Z10100523)
http://linked.open...iv/cisloPeriodika	1
http://linked.open...vai/riv/dodaniDat	2012
http://linked.open...aciTvurceVysledku	Vyšín, Luděk Burian, Tomáš Cihelka, Jaroslav Chalupský, Jaromír Hájková, Věra Juha, Libor
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Fyzikální ústav AV ČR, v. v. i.
http://linked.open...dnocenehoVysledku	192806
http://linked.open...ai/riv/idVysledku	RIV/68378271:_____/11:00359322
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	laser damage; thermal effects; multilayers; optical design and fabrication; free-electron lasers (en)
http://linked.open.../riv/klicoveSlovo	free-electron lasers laser damage multilayers optical design and fabrication thermal effects
http://linked.open...odStatuVydavatele	US - Spojené státy americké
http://linked.open...ontrolniKodProRIV	[D9582EA910C3]
http://linked.open...i/riv/nazevZdroje	Optics Express
http://linked.open...in/vavai/riv/obor	BH
http://linked.open...ichTvurcuVysledku	6 (xsd:int)
http://linked.open...cetTvurcuVysledku	26 (xsd:int)
http://linked.open...vavai/riv/projekt	Center of nanotechnology and materials for nanoelectronics Multifunctional bulk metallic materials with nanocrystalline and ultrafine-grained structure Research in the Frame of the International Center for Dense Magnetized Plasmas - ICDMP Centre of Laser Plasma Metal-Fullerene and Metal-Diamond Nanocomposites: Preparation, Characterization and Modification
http://linked.open...UplatneniVysledku	2011
http://linked.open...v/svazekPeriodika	19
http://linked.open...iv/tvurceVysledku	Burian, Tomáš Chalupský, Jaromír Hájková, Věra Juha, Libor Krzywinski, J. Vyšín, Luděk Bijkerk, F. Bruijn, S. Cihelka, Jaroslav Gleeson, A. Grzonka, J. Gullikson, E. M. Hau-Riege, S. Jurek, M. Khorsand, A. R. Klinger, D. London, R. Louis, E. Pelka, J. B. Płociński, T. Rasiński, M. Sobierajski, R. Tiedtke, K. Toleikis, S. Wabnitz, H. van de Kruijs, R.W.E.
http://linked.open...ain/vavai/riv/wos	000285915300031
http://linked.open...n/vavai/riv/zamer	Intense Radiation Sources and Radiation-Matter Interaction
issn	1094-4087
number of pages	13 (xsd:int)
http://bibframe.org/vocab/doi	10.1364/OE.19.000193

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