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  • This contribution deals with conductive thin film gas sensors fabricated using laser technology. The principle of pulsed laser deposition (PLD) technology is explained. The hybrid PLD systems, based on combination of PLD and magnetron, PLD and RF discharges and PLD from two laser targets, are also presented. Growing layers can be modified by ion beam. Organic films can be grown using cryogenic MAPLE technology. Nanocrystalline and testing of layer properties of gas sensors are given.
  • This contribution deals with conductive thin film gas sensors fabricated using laser technology. The principle of pulsed laser deposition (PLD) technology is explained. The hybrid PLD systems, based on combination of PLD and magnetron, PLD and RF discharges and PLD from two laser targets, are also presented. Growing layers can be modified by ion beam. Organic films can be grown using cryogenic MAPLE technology. Nanocrystalline and testing of layer properties of gas sensors are given. (en)
Title
  • Conductive gas sensors prepared using PLD
  • Conductive gas sensors prepared using PLD (en)
skos:prefLabel
  • Conductive gas sensors prepared using PLD
  • Conductive gas sensors prepared using PLD (en)
skos:notation
  • RIV/68378271:_____/10:00363985!RIV12-AV0-68378271
http://linked.open...avai/riv/aktivita
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  • Z(AV0Z10100520)
http://linked.open...vai/riv/dodaniDat
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  • 251814
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  • RIV/68378271:_____/10:00363985
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  • PLD; hybrid PLD; MAPLE; gas sensor; thin film sensor (en)
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http://linked.open...ontrolniKodProRIV
  • [6AF2B81FEBA0]
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  • Sozopol
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  • Dodrecht
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  • Nanotechnological Basis for Advanced Sensors
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  • Jelínek, Miroslav
  • Kocourek, Tomáš
  • Myslík, V.
  • Fitl, P.
  • Vrňata, M.
  • Fryček, R.
  • Vysloužil, F.
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number of pages
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  • Springer-Verlag
https://schema.org/isbn
  • 978-94-007-0902-7
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