About: Comparison between chemical and plasmatic treatment of seeding layer for patterned diamond growth

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	We employ UV photolithographic and electron beam lithographic patterning of diamond seeding layer on SiO2/Si substrates for the selective growth of micrometer and sub-micrometer diamond patterns. Using bottom-up strategy, thin diamond channels (470 nm in width) are directly grown. Differences between wet chemical and plasma treatment on the patterned diamond growth are studied. We find that the density of parasitic diamond crystals (outside predefined patterns) is lowered for gas mixture CF4/O2 plasma than for rich O2 plasma. After CF4/O2 plasma treatment, the density of parasitic crystals is 106 cm-2 which is comparable to the wet chemical treatment. Introducing sandwich-like structure, i.e. photoresist-seeding layer-photoresist, and its treatment (lift-off and CF4/O2 plasma) further reduces the density of parasitic crystals down to 105 cm-2. We employ UV photolithographic and electron beam lithographic patterning of diamond seeding layer on SiO2/Si substrates for the selective growth of micrometer and sub-micrometer diamond patterns. Using bottom-up strategy, thin diamond channels (470 nm in width) are directly grown. Differences between wet chemical and plasma treatment on the patterned diamond growth are studied. We find that the density of parasitic diamond crystals (outside predefined patterns) is lowered for gas mixture CF4/O2 plasma than for rich O2 plasma. After CF4/O2 plasma treatment, the density of parasitic crystals is 106 cm-2 which is comparable to the wet chemical treatment. Introducing sandwich-like structure, i.e. photoresist-seeding layer-photoresist, and its treatment (lift-off and CF4/O2 plasma) further reduces the density of parasitic crystals down to 105 cm-2. (en)
Title	Comparison between chemical and plasmatic treatment of seeding layer for patterned diamond growth Comparison between chemical and plasmatic treatment of seeding layer for patterned diamond growth (en)
skos:prefLabel	Comparison between chemical and plasmatic treatment of seeding layer for patterned diamond growth Comparison between chemical and plasmatic treatment of seeding layer for patterned diamond growth (en)
skos:notation	RIV/68378271:_____/10:00355161!RIV11-MSM-68378271
http://linked.open...avai/riv/aktivita	P Z
http://linked.open...avai/riv/aktivity	P(IAAX00100902), P(KAN400100701), P(KAN400480701), P(LC510), Z(AV0Z10100521)
http://linked.open...vai/riv/dodaniDat	2011
http://linked.open...aciTvurceVysledku	Remeš, Zdeněk Kromka, Alexander Rezek, Bohuslav Hruška, Karel Babchenko, Oleg
http://linked.open.../riv/druhVysledku	D - Článek ve sborníku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Fyzikální ústav AV ČR, v. v. i.
http://linked.open...dnocenehoVysledku	251362
http://linked.open...ai/riv/idVysledku	RIV/68378271:_____/10:00355161
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	diamond; plasma-enhanced CVD (PECVD) (deposition); microstructure (en)
http://linked.open.../riv/klicoveSlovo	microstructure diamond plasma-enhanced CVD (PECVD) (deposition)
http://linked.open...ontrolniKodProRIV	[12B6B7960C6E]
http://linked.open...v/mistoKonaniAkce	Boston
http://linked.open...i/riv/mistoVydani	Warrendale, PA
http://linked.open...i/riv/nazevZdroje	Diamond Electronics and Bioelectronics - Fundamentals to Applications III
http://linked.open...in/vavai/riv/obor	BM
http://linked.open...ichTvurcuVysledku	5 (xsd:int)
http://linked.open...cetTvurcuVysledku	6 (xsd:int)
http://linked.open...vavai/riv/projekt	Center of nanotechnology and materials for nanoelectronics Functional hybrid nanosystems of semiconductors and metals with organic materials (FUNS) NANOSTRUCTURES BASED ON CARBON AND POLYMERS FOR APPLICATION IN BIOELECTRONIC AND MEDICINE Electronically and chemically optimized nanocrystalline diamond structures for bio-applications
http://linked.open...UplatneniVysledku	2010
http://linked.open...iv/tvurceVysledku	Babchenko, Oleg Hruška, Karel Kromka, Alexander Rezek, Bohuslav Remeš, Zdeněk Purkrt, A.
http://linked.open...vavai/riv/typAkce	WRD - Světová
http://linked.open.../riv/zahajeniAkce	2009-11-30 (xsd:date)
http://linked.open...n/vavai/riv/zamer	Physics and technology of nanostructures, surfaces and thin films
number of pages	7 (xsd:int)
http://purl.org/ne...btex#hasPublisher	Materials Research Society
https://schema.org/isbn	978-1-60511-176-6

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