About: Generation of positive and negative oxygen ions in magnetron discharge during reactive sputtering of alumina

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About: Generation of positive and negative oxygen ions in magnetron discharge during reactive sputtering of alumina Goto Sponge NotDistinct Permalink

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	The paper is devoted to the investigation of ion composition of plasma of dc pulsed magnetron discharge generated by a magnetron with Al target in an Ar/O2 mixture. The magnetron discharge was investigated in the non-reactive, metallic and oxide mode of sputtering using a mass spectrometer. The amount and energies of neutral oxygen atoms O,positive O+ and O2+ ions, and negative O- and O2- ions were measured as a function of oxygen flow rate φO2, magnetron voltage Ud and constant power Pd=400W delivered to the magnetron discharge, repetition frequency of pulses f=10 kHz and the ratio of O2 and Ar flow rates φO2=φAr. The content of ions and radicals in magnetron discharge is compared with optical spectroscopy measurements. The obtained results give a deeper insight into reactive magnetron sputtering of oxide films. The paper is devoted to the investigation of ion composition of plasma of dc pulsed magnetron discharge generated by a magnetron with Al target in an Ar/O2 mixture. The magnetron discharge was investigated in the non-reactive, metallic and oxide mode of sputtering using a mass spectrometer. The amount and energies of neutral oxygen atoms O,positive O+ and O2+ ions, and negative O- and O2- ions were measured as a function of oxygen flow rate φO2, magnetron voltage Ud and constant power Pd=400W delivered to the magnetron discharge, repetition frequency of pulses f=10 kHz and the ratio of O2 and Ar flow rates φO2=φAr. The content of ions and radicals in magnetron discharge is compared with optical spectroscopy measurements. The obtained results give a deeper insight into reactive magnetron sputtering of oxide films. (en)
Title	Generation of positive and negative oxygen ions in magnetron discharge during reactive sputtering of alumina Generation of positive and negative oxygen ions in magnetron discharge during reactive sputtering of alumina (en)
skos:prefLabel	Generation of positive and negative oxygen ions in magnetron discharge during reactive sputtering of alumina Generation of positive and negative oxygen ions in magnetron discharge during reactive sputtering of alumina (en)
skos:notation	RIV/68378271:_____/10:00351378!RIV11-GA0-68378271
http://linked.open...avai/riv/aktivita	P Z
http://linked.open...avai/riv/aktivity	P(GP202/09/P324), P(IAA100100718), P(KAN400100653), Z(AV0Z10100522)
http://linked.open...iv/cisloPeriodika	11
http://linked.open...vai/riv/dodaniDat	2011
http://linked.open...aciTvurceVysledku	Lančok, Ján Musil, Jindřich Pokorný, Petr Novotný, Michal Bulíř, Jiří
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Fyzikální ústav AV ČR, v. v. i.
http://linked.open...dnocenehoVysledku	260359
http://linked.open...ai/riv/idVysledku	RIV/68378271:_____/10:00351378
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	aluminium oxide; ion-energy distribution function; magnetron; mass spectrometry; pulsed discharges (en)
http://linked.open.../riv/klicoveSlovo	aluminium oxide mass spectrometry magnetron ion-energy distribution function pulsed discharges
http://linked.open...odStatuVydavatele	DE - Spolková republika Německo
http://linked.open...ontrolniKodProRIV	[09E0DFD52C47]
http://linked.open...i/riv/nazevZdroje	Plasma Processes and Polymers
http://linked.open...in/vavai/riv/obor	BM
http://linked.open...ichTvurcuVysledku	5 (xsd:int)
http://linked.open...cetTvurcuVysledku	5 (xsd:int)
http://linked.open...vavai/riv/projekt	Self-organized magnetic nanostructures Advanced system for monitoring of the growth of metal nanostructures on dielectric substrate Metal-dielectric nanostructures for optics
http://linked.open...UplatneniVysledku	2010
http://linked.open...v/svazekPeriodika	7
http://linked.open...iv/tvurceVysledku	Lančok, Ján Musil, Jindřich Novotný, Michal Pokorný, Petr Bulíř, Jiří
http://linked.open...ain/vavai/riv/wos	000285212000004
http://linked.open...n/vavai/riv/zamer	Wave and Corpuscular Light Propagation, Optical Materials and Technology
issn	1612-8850
number of pages	5 (xsd:int)

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