About: Role of the tip induced local anodic oxidation in the conductive atomic force microscopy of mixed phase silicon thin films

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About: Role of the tip induced local anodic oxidation in the conductive atomic force microscopy of mixed phase silicon thin films Goto Sponge NotDistinct Permalink

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	We show that local currents observed by the Conductive Atomic Force Microscopy (C-AFM) of silicon thin films measured in ambient atmosphere are generally limited by surface oxide, either native or created by the measurement itself in a process of Local Anodic Oxidation (LAO), as evidenced by observed topographic changes of Si surface. The tip-induced LAO changes the character of the local current maps in repeated scans or even in the first scan of a pristine surface. In particular, the oxidation of the neighboring scan lines leads to the appearance of grain edges as conductive rings. Finally, we have used brief HF acid etch to strip the oxide in order to restore the contrast in the C-AFM maps of aged samples and we compare the observed local current levels to those observed in ultra-high vacuum C-AFM on in-situ deposited samples. We show that local currents observed by the Conductive Atomic Force Microscopy (C-AFM) of silicon thin films measured in ambient atmosphere are generally limited by surface oxide, either native or created by the measurement itself in a process of Local Anodic Oxidation (LAO), as evidenced by observed topographic changes of Si surface. The tip-induced LAO changes the character of the local current maps in repeated scans or even in the first scan of a pristine surface. In particular, the oxidation of the neighboring scan lines leads to the appearance of grain edges as conductive rings. Finally, we have used brief HF acid etch to strip the oxide in order to restore the contrast in the C-AFM maps of aged samples and we compare the observed local current levels to those observed in ultra-high vacuum C-AFM on in-situ deposited samples. (en)
Title	Role of the tip induced local anodic oxidation in the conductive atomic force microscopy of mixed phase silicon thin films Role of the tip induced local anodic oxidation in the conductive atomic force microscopy of mixed phase silicon thin films (en)
skos:prefLabel	Role of the tip induced local anodic oxidation in the conductive atomic force microscopy of mixed phase silicon thin films Role of the tip induced local anodic oxidation in the conductive atomic force microscopy of mixed phase silicon thin films (en)
skos:notation	RIV/68378271:_____/10:00347762!RIV11-MSM-68378271
http://linked.open...avai/riv/aktivita	P Z
http://linked.open...avai/riv/aktivity	P(IAA100100902), P(KAN400100701), P(LC06040), P(LC510), Z(AV0Z10100521)
http://linked.open...iv/cisloPeriodika	3-4
http://linked.open...vai/riv/dodaniDat	2011
http://linked.open...aciTvurceVysledku	Fejfar, Antonín Ledinský, Martin Stuchlík, Jiří Rezek, Bohuslav Vetushka, Aliaksi Kočka, Jan
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Fyzikální ústav AV ČR, v. v. i.
http://linked.open...dnocenehoVysledku	285769
http://linked.open...ai/riv/idVysledku	RIV/68378271:_____/10:00347762
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	local anodic oxidation (LAO); conductive atomic force microscopy (C-AFM) (en)
http://linked.open.../riv/klicoveSlovo	conductive atomic force microscopy (C-AFM) local anodic oxidation (LAO)
http://linked.open...odStatuVydavatele	DE - Spolková republika Německo
http://linked.open...ontrolniKodProRIV	[3D3530D99425]
http://linked.open...i/riv/nazevZdroje	Physica Status Solidi C: Current Topics in Solid State Physics
http://linked.open...in/vavai/riv/obor	BM
http://linked.open...ichTvurcuVysledku	6 (xsd:int)
http://linked.open...cetTvurcuVysledku	6 (xsd:int)
http://linked.open...vavai/riv/projekt	Center of nanotechnology and materials for nanoelectronics Functional hybrid nanosystems of semiconductors and metals with organic materials (FUNS) Structures for Nanophotonics and Nanoelectronics Study of ultrafast photoconductivity and charge transport in thin semiconducting layers using terahertz spectroscopy
http://linked.open...UplatneniVysledku	2010
http://linked.open...v/svazekPeriodika	7
http://linked.open...iv/tvurceVysledku	Rezek, Bohuslav Ledinský, Martin Fejfar, Antonín Stuchlík, Jiří Kočka, Jan Vetushka, Aliaksi
http://linked.open...n/vavai/riv/zamer	Physics and technology of nanostructures, surfaces and thin films
issn	1862-6351
number of pages	4 (xsd:int)

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