About: Optical emission and mass spectroscopy of plasma processes in reactive DC pulsed magnetron sputtering of aluminium oxide

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	Optical emission spectroscopy (OES) and mass spectrometry were used for plasma investigation of DC pulsed reactive magnetron sputtering of aluminium oxide. Aluminium target was sputtered in a reactive oxygen/argon atmosphere. Special attention was paid to the transition from the dielectric to metallic mode. Mass spectra were recorded at the substrate. OES spectra were taken at the target and at the substrate. Both mass and emission spectra obtained in the transition mode revealed distinct changes in plasma composition (O, O2, Al and AlO plasma species and corresponding positive ions). The transition from the dielectric to metallic mode is followed by a decrease of atomic oxygen intensity, while the intensity of aluminium species increases. AlO molecule appeared in the mass spectra only. Optical emission spectroscopy (OES) and mass spectrometry were used for plasma investigation of DC pulsed reactive magnetron sputtering of aluminium oxide. Aluminium target was sputtered in a reactive oxygen/argon atmosphere. Special attention was paid to the transition from the dielectric to metallic mode. Mass spectra were recorded at the substrate. OES spectra were taken at the target and at the substrate. Both mass and emission spectra obtained in the transition mode revealed distinct changes in plasma composition (O, O2, Al and AlO plasma species and corresponding positive ions). The transition from the dielectric to metallic mode is followed by a decrease of atomic oxygen intensity, while the intensity of aluminium species increases. AlO molecule appeared in the mass spectra only. (en)
Title	Optical emission and mass spectroscopy of plasma processes in reactive DC pulsed magnetron sputtering of aluminium oxide Optical emission and mass spectroscopy of plasma processes in reactive DC pulsed magnetron sputtering of aluminium oxide (en)
skos:prefLabel	Optical emission and mass spectroscopy of plasma processes in reactive DC pulsed magnetron sputtering of aluminium oxide Optical emission and mass spectroscopy of plasma processes in reactive DC pulsed magnetron sputtering of aluminium oxide (en)
skos:notation	RIV/68378271:_____/10:00343204!RIV11-GA0-68378271
http://linked.open...avai/riv/aktivita	P Z
http://linked.open...avai/riv/aktivity	P(GP202/09/P324), P(IAA100100718), P(KAN400100653), Z(AV0Z10100522)
http://linked.open...iv/cisloPeriodika	3
http://linked.open...vai/riv/dodaniDat	2011
http://linked.open...aciTvurceVysledku	Lančok, Ján Fitl, Přemysl Musil, Jindřich Pokorný, Petr Novotný, Michal Bulíř, Jiří Bočan, Jiří
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Fyzikální ústav AV ČR, v. v. i.
http://linked.open...dnocenehoVysledku	277154
http://linked.open...ai/riv/idVysledku	RIV/68378271:_____/10:00343204
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	reactive magnetron sputtering; alumina; plasma spectroscopy; mass spectroscopy; optical emission spectroscopy (en)
http://linked.open.../riv/klicoveSlovo	optical emission spectroscopy mass spectroscopy reactive magnetron sputtering alumina plasma spectroscopy
http://linked.open...odStatuVydavatele	RO - Rumunsko
http://linked.open...ontrolniKodProRIV	[E2BCD2162930]
http://linked.open...i/riv/nazevZdroje	Journal of Optoelectronics and Advanced Materials
http://linked.open...in/vavai/riv/obor	BH
http://linked.open...ichTvurcuVysledku	7 (xsd:int)
http://linked.open...cetTvurcuVysledku	7 (xsd:int)
http://linked.open...vavai/riv/projekt	Self-organized magnetic nanostructures Advanced system for monitoring of the growth of metal nanostructures on dielectric substrate Metal-dielectric nanostructures for optics
http://linked.open...UplatneniVysledku	2010
http://linked.open...v/svazekPeriodika	12
http://linked.open...iv/tvurceVysledku	Lančok, Ján Musil, Jindřich Novotný, Michal Pokorný, Petr Fitl, Přemysl Bulíř, Jiří Bočan, Jiří
http://linked.open...ain/vavai/riv/wos	000277827900057
http://linked.open...n/vavai/riv/zamer	Wave and Corpuscular Light Propagation, Optical Materials and Technology
issn	1454-4164
number of pages	4 (xsd:int)

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