About: Single shot damage mechanism of Mo/Si multilayer optics under intense pulsed XUV-exposure     Goto   Sponge   NotDistinct   Permalink

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  • We investigated single shot damage of Mo/Si multilayer coatings exposed to the intense fs XUV radiation at the Free-electron LASer facility in Hamburg - FLASH. The interaction process was studied in situ by XUV reflectometry, time resolved optical microscopy, and %22post-mortem%22 by interference-polarizing optical microscopy (with Nomarski contrast), atomic force microscopy, and scanning transmission electron microcopy. An ultrafast molybdenum silicide formation due to enhanced atomic diffusion in melted silicon has been determined to be the key process in the damage mechanism. The influence of the energy diffusion on the damage process was estimated. The results are of significance for the design of multilayer optics for a new generation of pulsed (from atto- to nanosecond) XUV sources.
  • We investigated single shot damage of Mo/Si multilayer coatings exposed to the intense fs XUV radiation at the Free-electron LASer facility in Hamburg - FLASH. The interaction process was studied in situ by XUV reflectometry, time resolved optical microscopy, and %22post-mortem%22 by interference-polarizing optical microscopy (with Nomarski contrast), atomic force microscopy, and scanning transmission electron microcopy. An ultrafast molybdenum silicide formation due to enhanced atomic diffusion in melted silicon has been determined to be the key process in the damage mechanism. The influence of the energy diffusion on the damage process was estimated. The results are of significance for the design of multilayer optics for a new generation of pulsed (from atto- to nanosecond) XUV sources. (en)
Title
  • Single shot damage mechanism of Mo/Si multilayer optics under intense pulsed XUV-exposure
  • Single shot damage mechanism of Mo/Si multilayer optics under intense pulsed XUV-exposure (en)
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  • Single shot damage mechanism of Mo/Si multilayer optics under intense pulsed XUV-exposure
  • Single shot damage mechanism of Mo/Si multilayer optics under intense pulsed XUV-exposure (en)
skos:notation
  • RIV/68378271:_____/10:00342469!RIV11-MSM-68378271
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • P(IAA400100701), P(KAN300100702), P(LA08024), P(LC510), P(LC528), Z(AV0Z10100523)
http://linked.open...iv/cisloPeriodika
  • 2
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
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http://linked.open...dnocenehoVysledku
  • 287549
http://linked.open...ai/riv/idVysledku
  • RIV/68378271:_____/10:00342469
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • laser damage; thermal effects; multilayers; optical design and fabrication; free-electron lasers (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...odStatuVydavatele
  • US - Spojené státy americké
http://linked.open...ontrolniKodProRIV
  • [D3BFA725FAAF]
http://linked.open...i/riv/nazevZdroje
  • Optics Express
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...vavai/riv/projekt
http://linked.open...UplatneniVysledku
http://linked.open...v/svazekPeriodika
  • 18
http://linked.open...iv/tvurceVysledku
  • Burian, Tomáš
  • Chalupský, Jaromír
  • Hájková, Věra
  • Juha, Libor
  • Krzywinski, J.
  • Vyšín, Luděk
  • Bijkerk, F.
  • Bruijn, S.
  • Cihelka, Jaroslav
  • Gleeson, A.
  • Gullikson, E. M.
  • Hau-Riege, S.
  • Jurek, M.
  • Khorsand, A. R.
  • Klinger, D.
  • London, R.
  • Louis, E.
  • Pelka, J. B.
  • Sobierajski, R.
  • Tiedtke, K.
  • Toleikis, S.
  • Wabnitz, H.
  • van de Kruijs, R.W.E.
  • Sokolowski-Tinten, K.
  • Jastrow, U.
  • Shymanovich, U.
  • Stojanovic, N.
  • van Hattum, E. D.
http://linked.open...ain/vavai/riv/wos
  • 000273860400032
http://linked.open...n/vavai/riv/zamer
issn
  • 1094-4087
number of pages
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