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Description
  • The influence of tilted surfaces on the measurement of shape by spatial coherence profilometry is investigated. Based on theoretical analysis and experimental results, the systematic measurement error caused by surface tilt is determined. The theoretical analysis and the experiments show the similarities and differences between spatial coherence profilometry and white-light interferometry.
  • The influence of tilted surfaces on the measurement of shape by spatial coherence profilometry is investigated. Based on theoretical analysis and experimental results, the systematic measurement error caused by surface tilt is determined. The theoretical analysis and the experiments show the similarities and differences between spatial coherence profilometry and white-light interferometry. (en)
Title
  • Spatial coherence profilometry on tilted surfaces
  • Spatial coherence profilometry on tilted surfaces (en)
skos:prefLabel
  • Spatial coherence profilometry on tilted surfaces
  • Spatial coherence profilometry on tilted surfaces (en)
skos:notation
  • RIV/68378271:_____/09:00340740!RIV10-MSM-68378271
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • P(1M06002), Z(AV0Z10100522), Z(MSM6198959213)
http://linked.open...iv/cisloPeriodika
  • 34
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 342727
http://linked.open...ai/riv/idVysledku
  • RIV/68378271:_____/09:00340740
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • tilted surface; spatial coherence profilometry; spatial coherence; measurement error; shape measurement (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...odStatuVydavatele
  • US - Spojené státy americké
http://linked.open...ontrolniKodProRIV
  • [C4FEACAFE530]
http://linked.open...i/riv/nazevZdroje
  • Applied Optics
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...vavai/riv/projekt
http://linked.open...UplatneniVysledku
http://linked.open...v/svazekPeriodika
  • 48
http://linked.open...iv/tvurceVysledku
  • Pavlíček, Pavel
  • Takeda, M.
  • Duan, Z.
  • Halouzka, M.
http://linked.open...ain/vavai/riv/wos
  • 000272284600008
http://linked.open...n/vavai/riv/zamer
issn
  • 0003-6935
number of pages
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