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About:
Selective area deposition of diamond structures
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An Entity of Type :
http://linked.opendata.cz/ontology/domain/vavai/Vysledek
, within Data Space :
linked.opendata.cz
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skos:Concept
http://linked.opendata.cz/ontology/domain/vavai/Vysledek
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rdf:type
skos:Concept
http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description
The report is about selective area deposition of diamond structures after the reactive ion etching and using a photo-resist as mask.
The report is about selective area deposition of diamond structures after the reactive ion etching and using a photo-resist as mask.
(en)
Title
Selective area deposition of diamond structures
Selective area deposition of diamond structures
(en)
skos:prefLabel
Selective area deposition of diamond structures
Selective area deposition of diamond structures
(en)
skos:notation
RIV/68378271:_____/09:00339576!RIV10-MSM-68378271
http://linked.open...avai/riv/aktivita
P
Z
http://linked.open...avai/riv/aktivity
P(KAN400100701), P(LC510), Z(AV0Z10100521), Z(MSM6840770021)
http://linked.open...vai/riv/dodaniDat
2010
http://linked.open...aciTvurceVysledku
Kromka, Alexander
Hruška, Karel
Vaněček, Milan
Babchenko, Oleg
http://linked.open.../riv/druhVysledku
D - Článek ve sborníku
http://linked.open...iv/duvernostUdaju
S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele
Fyzikální ústav AV ČR, v. v. i.
http://linked.open...dnocenehoVysledku
340651
http://linked.open...ai/riv/idVysledku
RIV/68378271:_____/09:00339576
http://linked.open...riv/jazykVysledku
eng - angličtina
http://linked.open.../riv/klicovaSlova
selective area deposition; plasma etching; polymer mask
(en)
http://linked.open.../riv/klicoveSlovo
plasma etching
selective area deposition
polymer mask
http://linked.open...ontrolniKodProRIV
[198AE368DFF7]
http://linked.open...v/mistoKonaniAkce
Bystrá, Liptovský Ján
http://linked.open...i/riv/mistoVydani
Zilina
http://linked.open...i/riv/nazevZdroje
Proceedings of the 15th International Conference on Applied Physics of Condensed Matter
http://linked.open...in/vavai/riv/obor
BM
http://linked.open...ichTvurcuVysledku
4
(
xsd:int
)
http://linked.open...cetTvurcuVysledku
4
(
xsd:int
)
http://linked.open...vavai/riv/projekt
Center of nanotechnology and materials for nanoelectronics
Functional hybrid nanosystems of semiconductors and metals with organic materials (FUNS)
http://linked.open...UplatneniVysledku
2009
http://linked.open...iv/tvurceVysledku
Babchenko, Oleg
Hruška, Karel
Kromka, Alexander
Vaněček, Milan
http://linked.open...vavai/riv/typAkce
EUR - Evropská
http://linked.open.../riv/zahajeniAkce
2009-06-24
(
xsd:date
)
http://linked.open...n/vavai/riv/zamer
Physics and technology of nanostructures, surfaces and thin films
Characterization of materials
number of pages
5
(
xsd:int
)
http://purl.org/ne...btex#hasPublisher
Žilinská univerzita v Žiline
https://schema.org/isbn
978-80-554-0057-0
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