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rdf:type
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Description
| - In this work, we investigate the deposition of Pb(Zr,Ti)O3 (PZT) thin films directly onto copper-coated polymer foils. (111)-textured PZT was fabricated on these flexible substrates by means of a RF-modulated plasma jet system comprising a hollow cathode for reactive sputtering. Film composition and microstructure as well as piezoelectric and dielectric film properties were investigated. The deposited films are suitable as embedded capacitors as well as flexible piezoelectric sensors, actuators and power generators.
- In this work, we investigate the deposition of Pb(Zr,Ti)O3 (PZT) thin films directly onto copper-coated polymer foils. (111)-textured PZT was fabricated on these flexible substrates by means of a RF-modulated plasma jet system comprising a hollow cathode for reactive sputtering. Film composition and microstructure as well as piezoelectric and dielectric film properties were investigated. The deposited films are suitable as embedded capacitors as well as flexible piezoelectric sensors, actuators and power generators. (en)
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Title
| - Deposition of PZT thin films on copper-coated polymer foils
- Deposition of PZT thin films on copper-coated polymer foils (en)
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skos:prefLabel
| - Deposition of PZT thin films on copper-coated polymer foils
- Deposition of PZT thin films on copper-coated polymer foils (en)
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skos:notation
| - RIV/68378271:_____/09:00337271!RIV10-AV0-68378271
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http://linked.open...avai/riv/aktivita
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http://linked.open...avai/riv/aktivity
| - P(GA202/08/1009), P(KJB100100703), Z(AV0Z10100522)
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http://linked.open...vai/riv/dodaniDat
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http://linked.open...aciTvurceVysledku
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http://linked.open.../riv/druhVysledku
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http://linked.open...iv/duvernostUdaju
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http://linked.open...titaPredkladatele
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http://linked.open...dnocenehoVysledku
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http://linked.open...ai/riv/idVysledku
| - RIV/68378271:_____/09:00337271
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http://linked.open...riv/jazykVysledku
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http://linked.open.../riv/klicovaSlova
| - PZT on polymer-foils; RF-modulated plasma jet system (en)
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http://linked.open.../riv/klicoveSlovo
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http://linked.open...ontrolniKodProRIV
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http://linked.open...v/mistoKonaniAkce
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http://linked.open...i/riv/mistoVydani
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http://linked.open...i/riv/nazevZdroje
| - Relability and Properties of Electronic Devices on Flexible Substrates (Simposium I at the 2008 MRS Fall Meeting)
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http://linked.open...in/vavai/riv/obor
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http://linked.open...ichTvurcuVysledku
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http://linked.open...cetTvurcuVysledku
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http://linked.open...vavai/riv/projekt
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http://linked.open...UplatneniVysledku
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http://linked.open...iv/tvurceVysledku
| - Dejneka, Alexandr
- Jastrabík, Lubomír
- Gerlach, G.
- Hubička, Zdeněk
- Suchaneck, G.
- Bdikin, I.
- Kholkin, A.
- Kiselev, D.
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http://linked.open...vavai/riv/typAkce
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http://linked.open.../riv/zahajeniAkce
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http://linked.open...n/vavai/riv/zamer
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number of pages
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http://purl.org/ne...btex#hasPublisher
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https://schema.org/isbn
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