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  • In this work, we investigate the deposition of Pb(Zr,Ti)O3 (PZT) thin films directly onto copper-coated polymer foils. (111)-textured PZT was fabricated on these flexible substrates by means of a RF-modulated plasma jet system comprising a hollow cathode for reactive sputtering. Film composition and microstructure as well as piezoelectric and dielectric film properties were investigated. The deposited films are suitable as embedded capacitors as well as flexible piezoelectric sensors, actuators and power generators.
  • In this work, we investigate the deposition of Pb(Zr,Ti)O3 (PZT) thin films directly onto copper-coated polymer foils. (111)-textured PZT was fabricated on these flexible substrates by means of a RF-modulated plasma jet system comprising a hollow cathode for reactive sputtering. Film composition and microstructure as well as piezoelectric and dielectric film properties were investigated. The deposited films are suitable as embedded capacitors as well as flexible piezoelectric sensors, actuators and power generators. (en)
Title
  • Deposition of PZT thin films on copper-coated polymer foils
  • Deposition of PZT thin films on copper-coated polymer foils (en)
skos:prefLabel
  • Deposition of PZT thin films on copper-coated polymer foils
  • Deposition of PZT thin films on copper-coated polymer foils (en)
skos:notation
  • RIV/68378271:_____/09:00337271!RIV10-AV0-68378271
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • P(GA202/08/1009), P(KJB100100703), Z(AV0Z10100522)
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 309503
http://linked.open...ai/riv/idVysledku
  • RIV/68378271:_____/09:00337271
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • PZT on polymer-foils; RF-modulated plasma jet system (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...ontrolniKodProRIV
  • [774B3E4E9E53]
http://linked.open...v/mistoKonaniAkce
  • Boston
http://linked.open...i/riv/mistoVydani
  • Warrendale, PA
http://linked.open...i/riv/nazevZdroje
  • Relability and Properties of Electronic Devices on Flexible Substrates (Simposium I at the 2008 MRS Fall Meeting)
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...vavai/riv/projekt
http://linked.open...UplatneniVysledku
http://linked.open...iv/tvurceVysledku
  • Dejneka, Alexandr
  • Jastrabík, Lubomír
  • Gerlach, G.
  • Hubička, Zdeněk
  • Suchaneck, G.
  • Bdikin, I.
  • Kholkin, A.
  • Kiselev, D.
http://linked.open...vavai/riv/typAkce
http://linked.open.../riv/zahajeniAkce
http://linked.open...n/vavai/riv/zamer
number of pages
http://purl.org/ne...btex#hasPublisher
  • MRS
https://schema.org/isbn
  • 9781615673834
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