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  • We exposed standard Mo/Si multilayer coatings, optimized for 13.5 nm radiation to the intense femtosecond XUV radiation at the FLASH free electron laser facility at intensities below and above the multilayer ablation threshold. The interaction process was studied in-situ with reflectometry and time resolved optical microscopy, and ex-situ with optical microscopy (Nomarski), atomic force microscopy and high resolution transmission electron microscopy. From analysis of the size of the observed craters as a function of the pulse energy the threshold for irreversible damage of the multilayer could be determined to be 45 mJ/cm2. The damage occurs on a longer time scale than the XUV pulse and even above the damage threshold XUV reflectance has been observed showing no measurable loss up to a power density of 1013 W/cm2. A first explanation of the physics mechanism leading to damage is given.
  • We exposed standard Mo/Si multilayer coatings, optimized for 13.5 nm radiation to the intense femtosecond XUV radiation at the FLASH free electron laser facility at intensities below and above the multilayer ablation threshold. The interaction process was studied in-situ with reflectometry and time resolved optical microscopy, and ex-situ with optical microscopy (Nomarski), atomic force microscopy and high resolution transmission electron microscopy. From analysis of the size of the observed craters as a function of the pulse energy the threshold for irreversible damage of the multilayer could be determined to be 45 mJ/cm2. The damage occurs on a longer time scale than the XUV pulse and even above the damage threshold XUV reflectance has been observed showing no measurable loss up to a power density of 1013 W/cm2. A first explanation of the physics mechanism leading to damage is given. (en)
Title
  • Damage studies of multilayer optics for XUV free electron lasers
  • Damage studies of multilayer optics for XUV free electron lasers (en)
skos:prefLabel
  • Damage studies of multilayer optics for XUV free electron lasers
  • Damage studies of multilayer optics for XUV free electron lasers (en)
skos:notation
  • RIV/68378271:_____/09:00335976!RIV10-MSM-68378271
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • P(IAA400100701), P(KAN300100702), P(LA08024), P(LC510), P(LC528), Z(AV0Z10100523)
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
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  • 309000
http://linked.open...ai/riv/idVysledku
  • RIV/68378271:_____/09:00335976
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • multilayer mirror; radiation damage; soft x-rays; free-electron laser (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...ontrolniKodProRIV
  • [18F0E24B3B9E]
http://linked.open...v/mistoKonaniAkce
  • Prague
http://linked.open...i/riv/mistoVydani
  • Bellingham
http://linked.open...i/riv/nazevZdroje
  • Damage to VUV, EUV, and X-ray Optics II
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...vavai/riv/projekt
http://linked.open...UplatneniVysledku
http://linked.open...iv/tvurceVysledku
  • Chalupský, Jaromír
  • Hájková, Věra
  • Juha, Libor
  • Bijkerk, F.
  • Cihelka, Jaroslav
  • Gaudin, J.
  • Gullikson, E. M.
  • Jurek, M.
  • Khorsand, A. R.
  • Klinger, D.
  • Louis, E.
  • Pelka, J. B.
  • Sobierajski, R.
  • Toleikis, S.
  • Wabnitz, H.
  • Jastrow, U.
  • van Hattum, E. D.
  • Tiedtke, K. I.
http://linked.open...vavai/riv/typAkce
http://linked.open.../riv/zahajeniAkce
http://linked.open...n/vavai/riv/zamer
number of pages
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  • SPIE
https://schema.org/isbn
  • 9780819476357
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