About: Radiation damage to amorphous carbon thin films irradiated by multiple 46.9 nm laser shots below the single-shot damage threshold

Facets (new session)
Description
Metadata
Settings
- owl:sameAs
- Inference Rule:

About: Radiation damage to amorphous carbon thin films irradiated by multiple 46.9 nm laser shots below the single-shot damage threshold Goto Sponge NotDistinct Permalink

An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

Attributes	Values
rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	High-surface-quality amorphous carbon (a-C) optical coatings with a thickness of 45 nm, deposited by magnetron sputtering on a silicon substrate, were irradiated by the 46.9 nm focused beam of capillary-discharge Ne-like Ar extreme ultraviolet laser. It has been found that an accumulation of 10, 20, and 40 shots at a fluence of 0.5 J/cm(2), i.e., below the single-shot damage threshold, causes irreversible changes of thin a-C layers, which can be registered by both the AFM and the DIC microscopy. In the center of the damaged area, AFM shows a-C removal to a maximum depth of 0.3, 1.2, and 1.5 nm for 10-, 20-and 40-shot exposure, respectively. High-surface-quality amorphous carbon (a-C) optical coatings with a thickness of 45 nm, deposited by magnetron sputtering on a silicon substrate, were irradiated by the 46.9 nm focused beam of capillary-discharge Ne-like Ar extreme ultraviolet laser. It has been found that an accumulation of 10, 20, and 40 shots at a fluence of 0.5 J/cm(2), i.e., below the single-shot damage threshold, causes irreversible changes of thin a-C layers, which can be registered by both the AFM and the DIC microscopy. In the center of the damaged area, AFM shows a-C removal to a maximum depth of 0.3, 1.2, and 1.5 nm for 10-, 20-and 40-shot exposure, respectively. (en)
Title	Radiation damage to amorphous carbon thin films irradiated by multiple 46.9 nm laser shots below the single-shot damage threshold Radiation damage to amorphous carbon thin films irradiated by multiple 46.9 nm laser shots below the single-shot damage threshold (en)
skos:prefLabel	Radiation damage to amorphous carbon thin films irradiated by multiple 46.9 nm laser shots below the single-shot damage threshold Radiation damage to amorphous carbon thin films irradiated by multiple 46.9 nm laser shots below the single-shot damage threshold (en)
skos:notation	RIV/68378271:_____/09:00334101!RIV10-MSM-68378271
http://linked.open...avai/riv/aktivita	P Z
http://linked.open...avai/riv/aktivity	P(IAA400100701), P(KAN300100702), P(LA08024), P(LC510), P(LC528), Z(AV0Z10100523)
http://linked.open...iv/cisloPeriodika	9
http://linked.open...vai/riv/dodaniDat	2010
http://linked.open...aciTvurceVysledku	Vorlíček, Vladimír Chalupský, Jaromír Hájková, Věra Juha, Libor
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Fyzikální ústav AV ČR, v. v. i.
http://linked.open...dnocenehoVysledku	337961
http://linked.open...ai/riv/idVysledku	RIV/68378271:_____/09:00334101
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	single-shot damage threshold; multiple-shot exposure damage; amorphous carbon; radiation erosion; capillary-discharge XUV laser (en)
http://linked.open.../riv/klicoveSlovo	amorphous carbon capillary-discharge XUV laser multiple-shot exposure damage radiation erosion single-shot damage threshold
http://linked.open...odStatuVydavatele	US - Spojené státy americké
http://linked.open...ontrolniKodProRIV	[D081D45333D6]
http://linked.open...i/riv/nazevZdroje	Journal of Applied Physics
http://linked.open...in/vavai/riv/obor	BH
http://linked.open...ichTvurcuVysledku	4 (xsd:int)
http://linked.open...cetTvurcuVysledku	8 (xsd:int)
http://linked.open...vavai/riv/projekt	Center of nanotechnology and materials for nanoelectronics Creating and probing nanostructures with X-ray lasers Research in the Frame of the International Center for Dense Magnetized Plasmas - ICDMP Centre of Laser Plasma Metal-Fullerene and Metal-Diamond Nanocomposites: Preparation, Characterization and Modification
http://linked.open...UplatneniVysledku	2009
http://linked.open...v/svazekPeriodika	105
http://linked.open...iv/tvurceVysledku	Chalupský, Jaromír Hájková, Věra Juha, Libor Störmer, M. Vorlíček, Vladimír Reale, A. Ritucci, A. Zuppella, P.
http://linked.open...ain/vavai/riv/wos	000266263300018
http://linked.open...n/vavai/riv/zamer	Intense Radiation Sources and Radiation-Matter Interaction
issn	0021-8979
number of pages	6 (xsd:int)

Faceted Search & Find service v1.16.118 as of Jun 21 2024

Alternative Linked Data Documents: ODE Content Formats:

RDF

ODATA

Microdata

About

OpenLink Virtuoso version 07.20.3240 as of Jun 21 2024, on Linux (x86_64-pc-linux-gnu), Single-Server Edition (126 GB total memory, 77 GB memory in use)
Data on this page belongs to its respective rights holders.
Virtuoso Faceted Browser Copyright © 2009-2024 OpenLink Software