About: Hybrid laser - magnetron technology for carbon composite coating

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	Hybrid laser- magnetron deposition system was developed and tested for study of carbon based thin film coatings. Various geometrical configurations and deposition conditions were tested. Films of TiC, TiCN, and SiC were synthesized. Films were fabricated in argon (TiC), in argon/nitrogen (TiCN), or in argon/hydrogen ambient (SiC films). Film properties were studied by SEM, XRD, GDOES, and XPS. Smooth, homogeneous film over the area of 9 cm 2 were prepared. Crystalline TiC films were grown at room substrate temperature Hybrid laser- magnetron deposition system was developed and tested for study of carbon based thin film coatings. Hybrid laser- magnetron deposition system was developed and tested for study of carbon based thin film coatings. Various geometrical configurations and deposition conditions were tested. Films of TiC, TiCN, and SiC were synthesized. Films were fabricated in argon (TiC), in argon/nitrogen (TiCN), or in argon/hydrogen ambient (SiC films). Film properties were studied by SEM, XRD, GDOES, and XPS. Smooth, homogeneous film over the area of 9 cm 2 were prepared. Crystalline TiC films were grown at room substrate temperature Hybrid laser- magnetron deposition system was developed and tested for study of carbon based thin film coatings. (en)
Title	Hybrid laser - magnetron technology for carbon composite coating Hybrid laser - magnetron technology for carbon composite coating (en)
skos:prefLabel	Hybrid laser - magnetron technology for carbon composite coating Hybrid laser - magnetron technology for carbon composite coating (en)
skos:notation	RIV/68378271:_____/09:00330295!RIV10-AV0-68378271
http://linked.open...avai/riv/aktivita	P S Z
http://linked.open...avai/riv/aktivity	P(GA202/06/0216), P(GA202/07/0591), S, Z(AV0Z10100521), Z(AV0Z10100522)
http://linked.open...iv/cisloPeriodika	2
http://linked.open...vai/riv/dodaniDat	2010
http://linked.open...aciTvurceVysledku	Kocourek, Tomáš Jelínek, Miroslav Zemek, Josef
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Fyzikální ústav AV ČR, v. v. i.
http://linked.open...dnocenehoVysledku	318084
http://linked.open...ai/riv/idVysledku	RIV/68378271:_____/09:00330295
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	SiC; thin films; PLD; hybrid deposition; composites (en)
http://linked.open.../riv/klicoveSlovo	PLD composites thin films SiC hybrid deposition
http://linked.open...odStatuVydavatele	RU - Ruská federace
http://linked.open...ontrolniKodProRIV	[F4525D9B3D62]
http://linked.open...i/riv/nazevZdroje	Laser Physics
http://linked.open...in/vavai/riv/obor	BM
http://linked.open...ichTvurcuVysledku	3 (xsd:int)
http://linked.open...cetTvurcuVysledku	4 (xsd:int)
http://linked.open...vavai/riv/projekt	Correlation between the dielectric properties of ferroelectric thin films and superlattices and their microstructure Study of plasma formed in hybrid arrangement of pulsed laser deposition
http://linked.open...UplatneniVysledku	2009
http://linked.open...v/svazekPeriodika	19
http://linked.open...iv/tvurceVysledku	Jelínek, Miroslav Kocourek, Tomáš Zemek, Josef Kadlec, J.
http://linked.open...ain/vavai/riv/wos	000263260200001
http://linked.open...n/vavai/riv/zamer	Physics and technology of nanostructures, surfaces and thin films Wave and Corpuscular Light Propagation, Optical Materials and Technology
issn	1054-660X
number of pages	5 (xsd:int)

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