About: Space resolved optical emission spectroscopy during deposition of BaxSr1-xTiO3 thin films by double hollow cathode plasma Jet system

Facets (new session)
Description
Metadata
Settings
- owl:sameAs
- Inference Rule:

About: Space resolved optical emission spectroscopy during deposition of BaxSr1-xTiO3 thin films by double hollow cathode plasma Jet system Goto Sponge NotDistinct Permalink

An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

Attributes	Values
rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	Pulse modulated double hollow cathode RF plasma jet system with two separate independent nozzles made of BaTiO3 (BTO) and SrTiO3 (STO) was used for deposition of BSTO thin films on Si and on multi-layer Si/SiO2/TiO2/Pt substrates. Space resolved optical emission spectroscopy (OES) was used mainly for monitoring of concentration of particles sputtered from the hollow cathode and for feedback correction of power supplied in both nozzles because applied power was responsible for sputtering speed of Ba and Sr particles. Main attention was focused on relation between ratio of spectral intensity of Ba, Ba+, Sr and Sr+ lines close to substrate and ratio of Ba and Sr concentration in the deposited film. 2D map of emission lines intensity distribution for Ba, Ba+, Sr, Sr+, Ti, Ar, and Ar+ for double hollow cathode plasma jet system with BTO and STO nozzles was created. Pulse modulated double hollow cathode RF plasma jet system with two separate independent nozzles made of BaTiO3 (BTO) and SrTiO3 (STO) was used for deposition of BSTO thin films on Si and on multi-layer Si/SiO2/TiO2/Pt substrates. Space resolved optical emission spectroscopy (OES) was used mainly for monitoring of concentration of particles sputtered from the hollow cathode and for feedback correction of power supplied in both nozzles because applied power was responsible for sputtering speed of Ba and Sr particles. Main attention was focused on relation between ratio of spectral intensity of Ba, Ba+, Sr and Sr+ lines close to substrate and ratio of Ba and Sr concentration in the deposited film. 2D map of emission lines intensity distribution for Ba, Ba+, Sr, Sr+, Ti, Ar, and Ar+ for double hollow cathode plasma jet system with BTO and STO nozzles was created. (en)
Title	Space resolved optical emission spectroscopy during deposition of BaxSr1-xTiO3 thin films by double hollow cathode plasma Jet system Space resolved optical emission spectroscopy during deposition of BaxSr1-xTiO3 thin films by double hollow cathode plasma Jet system (en)
skos:prefLabel	Space resolved optical emission spectroscopy during deposition of BaxSr1-xTiO3 thin films by double hollow cathode plasma Jet system Space resolved optical emission spectroscopy during deposition of BaxSr1-xTiO3 thin films by double hollow cathode plasma Jet system (en)
skos:notation	RIV/68378271:_____/09:00326764!RIV10-MSM-68378271
http://linked.open...avai/riv/aktivita	P Z
http://linked.open...avai/riv/aktivity	P(1M06002), P(GA202/08/1009), P(KAN301370701), P(KJB100100707), Z(AV0Z10100522)
http://linked.open...iv/cisloPeriodika	-
http://linked.open...vai/riv/dodaniDat	2010
http://linked.open...aciTvurceVysledku	Čada, Martin Virostko, Petr Hubička, Zdeněk Adámek, Petr Olejníček, Jiří Kment, Štěpán Jastrabík, Lubomír Dejneka, Alexandr
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Fyzikální ústav AV ČR, v. v. i.
http://linked.open...dnocenehoVysledku	342700
http://linked.open...ai/riv/idVysledku	RIV/68378271:_____/09:00326764
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	BaxSr1-xTiO3; BSTO; ferroelectric films; hollow cathode; optical emission spectroscopy (en)
http://linked.open.../riv/klicoveSlovo	BaxSr1-xTiO3 optical emission spectroscopy BSTO ferroelectric films hollow cathode
http://linked.open...odStatuVydavatele	CH - Švýcarská konfederace
http://linked.open...ontrolniKodProRIV	[C90711929234]
http://linked.open...i/riv/nazevZdroje	Materials Science Forum
http://linked.open...in/vavai/riv/obor	BM
http://linked.open...ichTvurcuVysledku	8 (xsd:int)
http://linked.open...cetTvurcuVysledku	8 (xsd:int)
http://linked.open...vavai/riv/projekt	Optical structures, detection systems and relevant technologies for low photon number applications Nanostructured Macroscopic Systems - Technology and Characterisation Characterization and technology of new perovskite structures Low-temperature plasmatic deposition of polycrystalline and nanocrystalline oxide thin films by systems with hollow cathodes
http://linked.open...UplatneniVysledku	2009
http://linked.open...v/svazekPeriodika	609
http://linked.open...iv/tvurceVysledku	Adámek, Petr Dejneka, Alexandr Jastrabík, Lubomír Kment, Štěpán Olejníček, Jiří Hubička, Zdeněk Čada, Martin Virostko, Petr
http://linked.open...ain/vavai/riv/wos	000264750100016
http://linked.open...n/vavai/riv/zamer	Wave and Corpuscular Light Propagation, Optical Materials and Technology
issn	0255-5476
number of pages	5 (xsd:int)

Faceted Search & Find service v1.16.118 as of Jun 21 2024

Alternative Linked Data Documents: ODE Content Formats:

RDF

ODATA

Microdata

About

OpenLink Virtuoso version 07.20.3240 as of Jun 21 2024, on Linux (x86_64-pc-linux-gnu), Single-Server Edition (126 GB total memory, 58 GB memory in use)
Data on this page belongs to its respective rights holders.
Virtuoso Faceted Browser Copyright © 2009-2024 OpenLink Software