About: A simple quality factor for characterization of thin silicon films

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	Silicon thin films were grown by plasma enhanced chemical vapor deposition at high-pressure (700 Pa), high-power (4– W/cm2) depletion regime using multi-hole cathode. Series of samples were deposited by varying hydrogen/silane ratio or plasma power to study evolution of film structure and transport properties near a-Si:H/μc-Si:H transition. We suggest a simple %22μc-Si:H layer quality factor%22 based on the ratio of subgap optical absorption α (1.4 eV)/α (1 eV) measured by constant photocurrent method. This ratio correlates well with the values of ambipolar diffusion lengths measured by surface photovoltage method perpendicularly to the substrate, i.e., in the direction of the collection of the photogenerated carriers in solar cells. Silicon thin films were grown by plasma enhanced chemical vapor deposition at high-pressure (700 Pa), high-power (4– W/cm2) depletion regime using multi-hole cathode. Series of samples were deposited by varying hydrogen/silane ratio or plasma power to study evolution of film structure and transport properties near a-Si:H/μc-Si:H transition. We suggest a simple %22μc-Si:H layer quality factor%22 based on the ratio of subgap optical absorption α (1.4 eV)/α (1 eV) measured by constant photocurrent method. This ratio correlates well with the values of ambipolar diffusion lengths measured by surface photovoltage method perpendicularly to the substrate, i.e., in the direction of the collection of the photogenerated carriers in solar cells. (en)
Title	A simple quality factor for characterization of thin silicon films A simple quality factor for characterization of thin silicon films (en)
skos:prefLabel	A simple quality factor for characterization of thin silicon films A simple quality factor for characterization of thin silicon films (en)
skos:notation	RIV/68378271:_____/08:00341936!RIV10-MZP-68378271
http://linked.open...avai/riv/aktivita	P Z
http://linked.open...avai/riv/aktivity	P(GD202/05/H003), P(IAA1010316), P(IAA1010413), P(LC06040), P(LC510), P(SN/3/172/05), Z(AV0Z10100521)
http://linked.open...iv/cisloPeriodika	19-25
http://linked.open...vai/riv/dodaniDat	2010
http://linked.open...aciTvurceVysledku	Stuchlíková, The-Ha Fejfar, Antonín Ledinský, Martin Stuchlík, Jiří Mates, Tomáš Kočka, Jan
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Fyzikální ústav AV ČR, v. v. i.
http://linked.open...dnocenehoVysledku	354511
http://linked.open...ai/riv/idVysledku	RIV/68378271:_____/08:00341936
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	microcrystalline silicon; deposition process; high growth rate; quality evaluation (en)
http://linked.open.../riv/klicoveSlovo	quality evaluation deposition process microcrystalline silicon high growth rate
http://linked.open...odStatuVydavatele	NL - Nizozemsko
http://linked.open...ontrolniKodProRIV	[F2A697851F4C]
http://linked.open...i/riv/nazevZdroje	Journal of Non-Crystalline Solids
http://linked.open...in/vavai/riv/obor	BM
http://linked.open...ichTvurcuVysledku	6 (xsd:int)
http://linked.open...cetTvurcuVysledku	6 (xsd:int)
http://linked.open...vavai/riv/projekt	Center of nanotechnology and materials for nanoelectronics Nanoscience and nanotechnology with scanning probe microscopes: from atomic processes to material properties Physics of complex condensed systems *Low-energy structure photovoltaic cells and PV systems elements Structures for Nanophotonics and Nanoelectronics Microcrystalline and nanocrystalline semiconductors for photonics:Electronic processes on the scales of nanometers and femtoseconds
http://linked.open...UplatneniVysledku	2008
http://linked.open...v/svazekPeriodika	354
http://linked.open...iv/tvurceVysledku	Ledinský, Martin Fejfar, Antonín Stuchlík, Jiří Kočka, Jan Stuchlíková, The-Ha Mates, Tomáš
http://linked.open...ain/vavai/riv/wos	000256500400036
http://linked.open...n/vavai/riv/zamer	Physics and technology of nanostructures, surfaces and thin films
issn	0022-3093
number of pages	4 (xsd:int)

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