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  • White-light interferometry measuring on rough surface does not resolve the lateral structure of the surface. Consequently the phase of the interferogram becomes a random variable. Therefore in white-light interferometry on rough surface, the phase is not evaluated and the zero path difference is determined by seeking the maximal contrast of the interference fringes. In this way the rough surface gives rise to a measurement error.
  • White-light interferometry measuring on rough surface does not resolve the lateral structure of the surface. Consequently the phase of the interferogram becomes a random variable. Therefore in white-light interferometry on rough surface, the phase is not evaluated and the zero path difference is determined by seeking the maximal contrast of the interference fringes. In this way the rough surface gives rise to a measurement error. (en)
Title
  • Influence of surface roughness on the measurement uncertainty of white-light interferometry
  • Influence of surface roughness on the measurement uncertainty of white-light interferometry (en)
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  • Influence of surface roughness on the measurement uncertainty of white-light interferometry
  • Influence of surface roughness on the measurement uncertainty of white-light interferometry (en)
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  • RIV/68378271:_____/08:00340918!RIV10-AV0-68378271
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  • P(KAN301370701), Z(AV0Z10100522)
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  • 372276
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  • RIV/68378271:_____/08:00340918
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  • rough surface; measurement uncertainty; white-light interferometry; speckle pattern; surface roughness (en)
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  • [844CAEF661E1]
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  • Polanica Zdrój
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  • Bellingham
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  • 16th Polish-Slovak-Czech Optical Conference on Wave and Quantum Aspects of Contemporary Optics
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  • Pavlíček, Pavel
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number of pages
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  • SPIE - The International Society for Optical Engineering
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  • 978-0-8194-7383-7
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