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| Description
| - Hydrogen-free amorphous silicon (a-Si) films were prepared by magnetron sputtering of pure silicon. Mechanical properties (hardness, intrinsic stress, elastic modulus), and film structure (Raman spectra, electron diffraction) were investigated in dependence on the substrate bias and temperature. The increasing negative substrate bias or Ar pressure results in simultaneous reducing compressive stress, the film hardness and elastic modulus. The crystalline structure (c-Si) starts to be formed at deposition temperature of 700 °C. The hardness and elastic modulus of c-Si films were very close to monocrystalline Si(111). Phase transformations observed in the samples at indentation depend not only on the load and loading rate but also on the initial phase of silicon. However, the film hardness is not too sensitive to the presence of phase transformations.
- Hydrogen-free amorphous silicon (a-Si) films were prepared by magnetron sputtering of pure silicon. Mechanical properties (hardness, intrinsic stress, elastic modulus), and film structure (Raman spectra, electron diffraction) were investigated in dependence on the substrate bias and temperature. The increasing negative substrate bias or Ar pressure results in simultaneous reducing compressive stress, the film hardness and elastic modulus. The crystalline structure (c-Si) starts to be formed at deposition temperature of 700 °C. The hardness and elastic modulus of c-Si films were very close to monocrystalline Si(111). Phase transformations observed in the samples at indentation depend not only on the load and loading rate but also on the initial phase of silicon. However, the film hardness is not too sensitive to the presence of phase transformations. (en)
- Filmy amorfního křemíku (a-Si) byly připraveny magnetronovým naprašováním čistého křemíku. Mechanické vlastnosti (Tvrdost, vnitřní pnutí, elastický modul) a struktura filmu (Ramanova spektra, elektronová difrakce) byla zkoumána v závislosti na teplotě substrátu a %22bias%22. Vzrůst negativního %22bias%22 nebo tlaku Ar vede k současné redukci vnitřních pnutí, tvrdosti a elastického modulu. Krystalická struktura (c-Si) se začíná formovat při depoziční teplotě 700 °C. Tvrdost a elastický modul c-Si filmů se blíží monokrystalickému křemíku (111). Pozorovaná fázová transformace při indentaci nezávisí jen na zátěžné síle a její rychlosti rástu, ale též na původní fázi Si. Tvrdost těchto filmů není však výrazně citlivá na tutu fázovou transformaci. (cs)
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| Title
| - Mechanical properties of amorphous and microcrystalline silicon films
- Mechanical properties of amorphous and microcrystalline silicon films (en)
- Mechanické vlastnosti amorfních a mikrokrystalických křemíkových vrstev (cs)
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| skos:prefLabel
| - Mechanical properties of amorphous and microcrystalline silicon films
- Mechanical properties of amorphous and microcrystalline silicon films (en)
- Mechanické vlastnosti amorfních a mikrokrystalických křemíkových vrstev (cs)
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| skos:notation
| - RIV/68378271:_____/08:00321380!RIV09-AV0-68378271
|
| http://linked.open...avai/riv/aktivita
| |
| http://linked.open...avai/riv/aktivity
| - P(1M06002), P(KAN301370701), Z(AV0Z10100520), Z(AV0Z10100522)
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| http://linked.open...iv/cisloPeriodika
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| http://linked.open...vai/riv/dodaniDat
| |
| http://linked.open...aciTvurceVysledku
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| http://linked.open.../riv/druhVysledku
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| http://linked.open...iv/duvernostUdaju
| |
| http://linked.open...titaPredkladatele
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| http://linked.open...dnocenehoVysledku
| |
| http://linked.open...ai/riv/idVysledku
| - RIV/68378271:_____/08:00321380
|
| http://linked.open...riv/jazykVysledku
| |
| http://linked.open.../riv/klicovaSlova
| - a-Si films; hardness; elastic modulus; compressive stress; Raman spectra (en)
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| http://linked.open.../riv/klicoveSlovo
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| http://linked.open...odStatuVydavatele
| - CH - Švýcarská konfederace
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| http://linked.open...ontrolniKodProRIV
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| http://linked.open...i/riv/nazevZdroje
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| http://linked.open...in/vavai/riv/obor
| |
| http://linked.open...ichTvurcuVysledku
| |
| http://linked.open...cetTvurcuVysledku
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| http://linked.open...vavai/riv/projekt
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| http://linked.open...UplatneniVysledku
| |
| http://linked.open...v/svazekPeriodika
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| http://linked.open...iv/tvurceVysledku
| - Boháč, Petr
- Kulykovskyy, Valeriy
- Stranyánek, Martin
- Vorlíček, Vladimír
- Čtvrtlík, Radim
- Kurdyumov, A.
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| http://linked.open...ain/vavai/riv/wos
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| http://linked.open...n/vavai/riv/zamer
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| issn
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| number of pages
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