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Description
  • n this paper following questions are answered by means of numerical simulations: which height is measured by white-light interferometry when the surface is rough? how does the surface roughness affect the measurement uncertainty?
  • n this paper following questions are answered by means of numerical simulations: which height is measured by white-light interferometry when the surface is rough? how does the surface roughness affect the measurement uncertainty? (en)
  • V tomto článku jsou pomocí numerických simulací zodpovězeny následující otázky: jaká výška je naměřena interferometrií v bílém světle, pokud je povrch předmětu drsný? jak ovlivňuje drsnost povrchu nejistotu měření? (cs)
Title
  • White-light interferometry on rough surfaces - measurement uncertainty caused by surface roughness
  • [Interferometrie v bílém světle - nejistota měření způsobená drsností povrchu (cs)
  • White-light interferometry on rough surfaces - measurement uncertainty caused by surface roughness (en)
skos:prefLabel
  • White-light interferometry on rough surfaces - measurement uncertainty caused by surface roughness
  • [Interferometrie v bílém světle - nejistota měření způsobená drsností povrchu (cs)
  • White-light interferometry on rough surfaces - measurement uncertainty caused by surface roughness (en)
skos:notation
  • RIV/68378271:_____/08:00320723!RIV09-AV0-68378271
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • P(KAN301370701), Z(AV0Z10100522), Z(MSM6198959213)
http://linked.open...iv/cisloPeriodika
  • 16
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 405729
http://linked.open...ai/riv/idVysledku
  • RIV/68378271:_____/08:00320723
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • white-light interferometry; measurement uncertainty; rough surface; surface roughness (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...odStatuVydavatele
  • US - Spojené státy americké
http://linked.open...ontrolniKodProRIV
  • [7AF35E03E7B3]
http://linked.open...i/riv/nazevZdroje
  • Applied Optics
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...vavai/riv/projekt
http://linked.open...UplatneniVysledku
http://linked.open...v/svazekPeriodika
  • 47
http://linked.open...iv/tvurceVysledku
  • Pavlíček, Pavel
  • Hýbl, Ondřej
http://linked.open...ain/vavai/riv/wos
  • 000256847300007
http://linked.open...n/vavai/riv/zamer
issn
  • 0003-6935
number of pages
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