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  • Diamond films were grown by Microwave Plasma (MP) and Hot Filament chemical Vapor Deposition (HF CVD) on Si substrates. The dependence of electrical properties on the film morphology was studied. The surface morphology of grown layers was analyzed by scanning electron microscopy. The different crystallographic character of diamond layers, i.e. either polycrystalline or nanocrystalline, was achieved by using different deposition conditions. Lower-quality diamond films were less sensitive to variation in the operating conditions. The film break-down voltage and other electrical parameters strongly depend on the morphological character, the grain size and defects in layers.
  • Diamond films were grown by Microwave Plasma (MP) and Hot Filament chemical Vapor Deposition (HF CVD) on Si substrates. The dependence of electrical properties on the film morphology was studied. The surface morphology of grown layers was analyzed by scanning electron microscopy. The different crystallographic character of diamond layers, i.e. either polycrystalline or nanocrystalline, was achieved by using different deposition conditions. Lower-quality diamond films were less sensitive to variation in the operating conditions. The film break-down voltage and other electrical parameters strongly depend on the morphological character, the grain size and defects in layers. (en)
  • Diamantové vrstvy byli deponováni na Si substráty v mikrovlnném plazmatu a technikou žhaveného vlákna. Vliv morfologie na elektrické vlastnosti byl studován elektrickými měřeními. Rozdílná morfologie vrstev, tj. její polykrystalický nebo nanokrystalický charakter, byla dosažena vhodnou volbou procesních parametrů. Průrazné napětí a elektrické vlastnosti diamantových vrstev záviseli na morfologii vrstvy, tj. velikosti zrn a přítomných defektu. (cs)
Title
  • Comparative study of electrical properties of nano to polycrystalline diamond films
  • Studium elektrických vlastnosti nano a polykrystalických vrstev diamantu (cs)
  • Comparative study of electrical properties of nano to polycrystalline diamond films (en)
skos:prefLabel
  • Comparative study of electrical properties of nano to polycrystalline diamond films
  • Studium elektrických vlastnosti nano a polykrystalických vrstev diamantu (cs)
  • Comparative study of electrical properties of nano to polycrystalline diamond films (en)
skos:notation
  • RIV/68378271:_____/08:00319787!RIV09-AV0-68378271
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • Z(AV0Z10100521)
http://linked.open...iv/cisloPeriodika
  • 5
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
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http://linked.open...titaPredkladatele
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  • 360512
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  • RIV/68378271:_____/08:00319787
http://linked.open...riv/jazykVysledku
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  • microwave plasma CVD; hot filament CVD; electrical measurements (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...odStatuVydavatele
  • GB - Spojené království Velké Británie a Severního Irska
http://linked.open...ontrolniKodProRIV
  • [3F368FCCC4F5]
http://linked.open...i/riv/nazevZdroje
  • Journal of Physics: Conference Series
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...UplatneniVysledku
http://linked.open...v/svazekPeriodika
  • 100
http://linked.open...iv/tvurceVysledku
  • Kromka, Alexander
  • Novotný, I.
  • Veselý, M.
  • Michalka, M.
  • Valent, P.
  • Vojs, M.
  • Ižák, T.
  • Kováčik, T.
  • Škriniarová, J.
http://linked.open...n/vavai/riv/zamer
issn
  • 1742-6588
number of pages
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