About: Early stage of diamond growth at low temperature

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	We investigate the first stages of nanocrystalline diamond (NCD) thin film growth at low substrate temperature. NCD films were grown on silicon substrates by microwave plasma enhanced chemical vapor deposition (CVD) for 0–300 min at a temperature of 410°C. Stagnation of the AFM roughness indicates that the low temperature NCD growth is a) delayed due to the surface contamination of the used nanodiamond powder and b) possibly dominated by the growth in the lateral direction. XPS measurements showed that the measured surface exhibits changes from a multi-phase composite (seeding layer) to single phase one (NCD layer). We investigate the first stages of nanocrystalline diamond (NCD) thin film growth at low substrate temperature. NCD films were grown on silicon substrates by microwave plasma enhanced chemical vapor deposition (CVD) for 0–300 min at a temperature of 410°C. Stagnation of the AFM roughness indicates that the low temperature NCD growth is a) delayed due to the surface contamination of the used nanodiamond powder and b) possibly dominated by the growth in the lateral direction. XPS measurements showed that the measured surface exhibits changes from a multi-phase composite (seeding layer) to single phase one (NCD layer). (en) Počáteční fáze růstu nanokrystalických diamantových vrstev (NCD) deponovaných za nízkých teplot (410°C) na Si substráty v mikrovlnném plazmatu byli študování pro procesní čas v intervalu 0-300 minut. Stagnace AFM drsnosti indikuje že nízkoteplotní růst je oneskoren v důsledku a) kontaminace nukleačního diamantového prášku nebo b) možné dominance laterálního růstu. XPS měření potvrzují změnu povrchu s mnoho-zložkového kompozitu (nukleací vrstva) na mono-zložkový systém (NCD vrstva). (cs)
Title	Early stage of diamond growth at low temperature Early stage of diamond growth at low temperature (en) Počáteční stadia růstu diamantových vrstev za nizkých teplot (cs)
skos:prefLabel	Early stage of diamond growth at low temperature Early stage of diamond growth at low temperature (en) Počáteční stadia růstu diamantových vrstev za nizkých teplot (cs)
skos:notation	RIV/68378271:_____/08:00319717!RIV09-AV0-68378271
http://linked.open...avai/riv/aktivita	P Z
http://linked.open...avai/riv/aktivity	P(1M06002), P(KAN400100652), P(KAN400100701), Z(AV0Z10100521)
http://linked.open...iv/cisloPeriodika	7-10
http://linked.open...vai/riv/dodaniDat	2009
http://linked.open...aciTvurceVysledku	Čermák, Jan Zemek, Josef Kromka, Alexander Rezek, Bohuslav Potocký, Štěpán Vaněček, Milan
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Fyzikální ústav AV ČR, v. v. i.
http://linked.open...dnocenehoVysledku	364766
http://linked.open...ai/riv/idVysledku	RIV/68378271:_____/08:00319717
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	nanocrystalline diamond film; AFM; SEM; low temperature CVD (en)
http://linked.open.../riv/klicoveSlovo	nanocrystalline diamond film SEM AFM low temperature CVD
http://linked.open...odStatuVydavatele	CH - Švýcarská konfederace
http://linked.open...ontrolniKodProRIV	[352D00E081F6]
http://linked.open...i/riv/nazevZdroje	Diamond and Related Materials
http://linked.open...in/vavai/riv/obor	BM
http://linked.open...ichTvurcuVysledku	6 (xsd:int)
http://linked.open...cetTvurcuVysledku	6 (xsd:int)
http://linked.open...vavai/riv/projekt	Optical structures, detection systems and relevant technologies for low photon number applications Functional hybrid nanosystems of semiconductors and metals with organic materials (FUNS) Structures for spintronics and quantum phenomena created by electron beam lithography
http://linked.open...UplatneniVysledku	2008
http://linked.open...v/svazekPeriodika	17
http://linked.open...iv/tvurceVysledku	Kromka, Alexander Rezek, Bohuslav Zemek, Josef Čermák, Jan Potocký, Štěpán Vaněček, Milan
http://linked.open...ain/vavai/riv/wos	000259598300042
http://linked.open...n/vavai/riv/zamer	Physics and technology of nanostructures, surfaces and thin films
issn	0925-9635
number of pages	4 (xsd:int)

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