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rdf:type
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Description
| - Low-pressure plasma jet system with two hollow cathodes was used for deposition of BaxSr1-xTiO3 (BSTO) ferroelectric thin films. In the experiment, the composition of BSTO films was controlled by magnitude of average RF power applied on particular plasma jet guns with STO and BTO nozzles. X-ray diffraction proved that BSTO thin films were polycrystalline with perovskite structure and measurement of dielectric properties showed ferroelectric hysteresis loop at room temperature.
- Low-pressure plasma jet system with two hollow cathodes was used for deposition of BaxSr1-xTiO3 (BSTO) ferroelectric thin films. In the experiment, the composition of BSTO films was controlled by magnitude of average RF power applied on particular plasma jet guns with STO and BTO nozzles. X-ray diffraction proved that BSTO thin films were polycrystalline with perovskite structure and measurement of dielectric properties showed ferroelectric hysteresis loop at room temperature. (en)
- Nízkotlaký systém dvou plazmových trysek s efektem duté katody byl použit pro depozice feroelektrických tenkých vrstev BaxSr1-xTiO3 (BSTO). Složení BSTO vrstev bylo řízeno velikostí středního vysokofrekvenčního výkonu přiváděného na jednotlivé trysky vyrobené z BTO a STO. Rentgenová difraktometrie potvrdila, že deponované vrstvy BSTO jsou polykrystalické s perovskitovskou strukturou, a měření jejich dielektrických vlastností odhalilo feroelektrickou smyčku při pokojové teplotě. (cs)
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Title
| - Deposition of BaxSr1-xTiO3 thin films by double RF hollow cathode plasma jet system
- Deposition of BaxSr1-xTiO3 thin films by double RF hollow cathode plasma jet system (en)
- Depozice tenkých vrstev BaxSr1-xTiO3 pomocí systému dvou vysokofrekvenčních plazmových trysek s efektem duté katody (cs)
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skos:prefLabel
| - Deposition of BaxSr1-xTiO3 thin films by double RF hollow cathode plasma jet system
- Deposition of BaxSr1-xTiO3 thin films by double RF hollow cathode plasma jet system (en)
- Depozice tenkých vrstev BaxSr1-xTiO3 pomocí systému dvou vysokofrekvenčních plazmových trysek s efektem duté katody (cs)
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skos:notation
| - RIV/68378271:_____/08:00319065!RIV09-AV0-68378271
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http://linked.open...avai/riv/aktivita
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http://linked.open...avai/riv/aktivity
| - P(1QS100100563), P(GA202/06/0776), P(KAN101120701), P(KAN301370701), P(KJB100100707), Z(AV0Z10100522), Z(MSM0021620834)
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http://linked.open...iv/cisloPeriodika
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http://linked.open...vai/riv/dodaniDat
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http://linked.open...aciTvurceVysledku
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http://linked.open.../riv/druhVysledku
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http://linked.open...iv/duvernostUdaju
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http://linked.open...titaPredkladatele
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http://linked.open...dnocenehoVysledku
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http://linked.open...ai/riv/idVysledku
| - RIV/68378271:_____/08:00319065
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http://linked.open...riv/jazykVysledku
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http://linked.open.../riv/klicovaSlova
| - BSTO; ferroelectric films; hollow cathode; Langmuir probe; optical emission spectroscopy; plasma jet (en)
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http://linked.open.../riv/klicoveSlovo
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http://linked.open...odStatuVydavatele
| - DE - Spolková republika Německo
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http://linked.open...ontrolniKodProRIV
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http://linked.open...i/riv/nazevZdroje
| - Contributions to Plasma Physics
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http://linked.open...in/vavai/riv/obor
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http://linked.open...ichTvurcuVysledku
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http://linked.open...cetTvurcuVysledku
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http://linked.open...vavai/riv/projekt
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http://linked.open...UplatneniVysledku
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http://linked.open...v/svazekPeriodika
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http://linked.open...iv/tvurceVysledku
| - Adámek, Petr
- Jastrabík, Lubomír
- Olejníček, Jiří
- Hubička, Zdeněk
- Čada, Martin
- Tichý, M.
- Deyneka, Alexander
- Virostko, Petr
- Churpita, Olexander
- Valvoda, V.
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http://linked.open...ain/vavai/riv/wos
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http://linked.open...n/vavai/riv/zamer
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issn
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number of pages
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